Used EATON NOVA / AXCELIS Optima HD #293760174 for sale

ID: 293760174
High current implanter Source magnet.
EATON NOVA / AXCELIS Optima HD is a state-of-the-art ion implanter and monitor designed to help semiconductor manufacturers achieve precision and repeatability at the highest levels of performance. This equipment provides excellent repeatability and accuracy while allowing users to benefit from higher productivity. AXCELIS Optima HD features a high-resolution beam current monitor system that utilizes proprietary algorithms to detect small changes in the beam current which allows for greater level of performance and uniformity across the die. The ion beam emitter has been designed to enhance low energy dose consistency, and includes a patented active posture correction unit which allows for accurate and repeatable beam centering for optimal performance. Additionally, the optimized beam control technology provides a powerful yet flexible control interface that helps manufacturers better understand and manage their ion implantation processes. EATON NOVA Optima HD machine also supports advanced pattern rates of up to 280 wafers per hour, facilitating better productivity and increased throughput. Furthermore, the tool offers a wide range of Automatic Process Control (APC) functions that includes ion beam uniformity, dose uniformity, and dose monitoring that help streamline the implant process and reduce implantation errors. Finally, Optima HD also offers an advanced automated asset health monitoring feature that helps keeps operations running in near-optimum condition while providing predictive maintenance capabilities to anticipate and address potential problems before they become major issues. In addition, the model features comprehensive safety features such as emergency shutoff, audible alarms, and machine locking that help to protect operators and bystanders in potentially hazardous scenarios. Overall, EATON NOVA / AXCELIS Optima HD is designed to provide fast, accurate, and efficient ion implantation with a level of control and accuracy that is second to none, allowing manufacturers to achieve breathtaking levels of device performance with minimal downtime due to maintenance or errors.
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