Used EATON NOVA / AXCELIS Optima HD #293760175 for sale

ID: 293760175
High current implanter P/N: 9701-2680-01, 9700-5384-12 (2) Load ports.
AXCELIS/Acelis EATON NOVA / AXCELIS Optima HD is a next-generation ion implanter and monitor that delivers enhanced performance, flexibility, and reliability in a single integrated product. This equipment is designed with unique expertise and technology to maximize efficiency and production yields while providing maximum beam uniformity. AXCELIS Optima HD features dual ion source technology, allowing for faster and more efficient production across a wide range of implant concentrations. Automated transport enhances the throughput capabilities of the system while reducing downtime. The unit has been designed for optimal flexibility, allowing for custom programmability, advanced fault detection, and a unified set of user interfaces. EATON NOVA Optima HD is capable of high-resolution scanning of up to 300mm x 300mm wafers. This machine is able to consistently maintain a tight beam spot size with as little as 0.3mm. It is also designed to minimize the adverse effects of reflections, introducing fewer particles into the implant process. The tool also features uniformity control, allowing for uniform distributions of up to 4.5%. EATON NOVA/AcelisOptima HD is equipped with several advanced safety features. The ion source temperature range is automatically monitored and kept within an optimal range in order to guarantee safe operation. Additionally, the asset features closed-loop monitoring which reduces the risk of beam scattering from the target. This model is also designed for ease of use. The user interface can be programmed from a USB recloser or PLC interface which makes operation more convenient than ever before. The equipment also features self-diagnostic functions that alert users to potential issues before they become problems. Operating with EATON NOVA / AXCELIS Optima HD is minimally intrusive due to its low vibration and acoustic levels. This makes the implant process quieter and more convenient, allowing for improved productivity. The system is engineered with incredible longevity due to its robust and durable components, including a reliable series of beam deflectors that can provide up to 10 years of service life. EATON NOVA / AXCELIS/Acelis AXCELIS Optima HD is a powerful and dependable ion implanter and monitor. Its dual ion source technology and automated transport features provide increased efficiency while its advanced safety functions guarantee a stable and safe operation. This unit is designed for ease of use and efficient production, making it the ideal choice for implant research.
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