Used EATON NOVA / AXCELIS Optima HD #293778546 for sale

ID: 293778546
High current implanter (2) Load ports Wafer handling module.
EATON NOVA / AXCELIS Optima HD is an advanced ion implanter and monitor equipment designed to provide industry-leading performance for ion and particle beam implantation applications. AXCELIS Optima HD is specifically designed to provide high-energy wafer machining, ultra-low-emission implantation, and high volume production. The system features an innovative beam-envelope-driven design that allows operation to cover a wide range of implantation energies and doses. The advanced digital ion optical unit is capable of producing a highly uniform implantation field and provides exceptional process performance. EATON NOVA Optima HD features integrated particle acceleration, ion source, and beam control sub-systems. All of these components are designed to provide high precision and accuracy when implanting a wide range of activatable, conductive, and insulating materials on the wafer. In addition, Optima HD also features advanced, real-time dynamic implanted-charge and temperature monitoring. This advanced monitoring machine allows for repeatable and accurate implantation that would be impossible without real-time data collection and analysis. EATON NOVA / AXCELIS Optima HD provides user-friendly operation and includes a wide range of customization options. Its advanced graphical user interface helps operators minimize errors, reduce maintenance and maximize throughput. AXCELIS Optima HD also includes a high-speed analytical processor for excellent data analysis capabilities. The tool can be easily upgraded to support new technologies and processes. Additionally, EATON NOVA Optima HD allows for the convenient integration of remote diagnostic capabilities. Optima HD is compliant with SEMI S2, S2P, and S2PA safety standards and comes with a single-year maintenance package. EATON NOVA / AXCELIS Optima HD is designed to reduce operational costs while helping manufacturers stay competitive in today's increasingly advanced markets. With its industry-leading speed, precision, and performance, AXCELIS Optima HD is an ideal choice for those looking to upgrade their ion implanter and monitor asset.
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