Used EATON NOVA / AXCELIS Optima HD #9244859 for sale

EATON NOVA / AXCELIS Optima HD
ID: 9244859
Wafer Size: 12"
Vintage: 2007
Ion implanter, 12" 2007 vintage.
EATON NOVA / AXCELIS Optima HD is a combinatorial ion implanter and monitor used for semiconductor-based materials processing. This advanced equipment features a low-energy terminal, a scanning electron microscope with remote control, an x-ray fluorescence spectrometer, and a three-axis sample positioner. AXCELIS Optima HD is also fitted with a NaI scintillator for the detection of light emitted at the sample surface, as well as an electron microscope type detector for the measurement of current. All of these components enable EATON NOVA Optima HD to accurately deliver precise doses of ions into the sample material. The low-energy terminal is equipped with advanced features that allow for accurate energy control of the beam energy during implantation. This terminal also features of range of other functions such as a power supply, current control, a temperature control system, and a gate valve control unit. As with all the components of Optima HD, the low-energy terminal features have been designed for optimum performance. The scanning electron microscope (SEM) is also equipped with advanced features. It includes a 5-axis control and a comprehensive set of image formation systems that can be used to gather crucial information about the sample material. It also accommodates a wide range of sample geometries. Additionally, the SEM is linked to a computerized control machine to enable remote operation. The x-ray fluorescence spectrometer ensures accurate and precise control of dopants and contaminants during the implantation process. It utilizes a linear accelerator to generate highly focused, high-energy x-ray beams that penetrate through the sample material and detect the characteristic energy response of the material. This data is then collected and analyzed to ensure precision implantation. The three-axis sample positioner allows for precise manipulation of the sample material, ensuring that it is positioned correctly for optimum implantation accuracy. It features precise spatial control of the position of the sample material, and can accommodate a wide variety of sample geometries. Finally, EATON NOVA / AXCELIS Optima HD also comes with a NaI scintillator for the detection of light emitted from the sample surface. This allows the tool to accurately monitor the implantation process without having to manually monitor the sample. This, in turn, further ensures the highest level of implantation accuracy. Overall, AXCELIS Optima HD ion implanter and monitor is a sophisticated and powerful asset. Its advanced features and components allow for precise implantation of sample materials, ultimately ensuring consistent yields and reliable product performance.
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