Used EATON NOVA / AXCELIS Optima HD #9262050 for sale

EATON NOVA / AXCELIS Optima HD Ion Implanter & Monitor is a versatile, next-generation implanter and monitor designed to help maximize productivity while enabling superior beam uniformity, wafer quality, and consistency. This ion implanter sets a new level of performance and reliability in the semiconductor industry, leveraging an innovative combination of advanced beam technology and intuitive software and hardware features. The Optima HX Implanter features a proprietary dual-source OptiSource™ ion source with dual plasma extensions. This enables two different types of ions—either positive or negative—to be implanted simultaneously from each source, allowing for highest productivity ion implantation. This advanced source also has significantly fewer parts than conventional sources, making it easy to maintain and control. The source is surrounded by unique extraction grid technology that ensures reliable extraction of ions and provides consistent uniformity across the wafer surface. AXCELIS Optima HD monitor provides superior monitoring capability including beam current control, spot size and shape monitoring, and particle dimensional measurements. This monitor captures 100% of the implant wafer area, and detects any variations in the implant process via a unique vision system. This system uses an intelligent camera to capture images of implanted sites and evaluate the quality of those implants. The Optima HX implanter and monitor is powered by AXCELIS UNICUS™ Process Control Software which provides a modern platform with sophisticated analytics. This industry-leading software allows operators to track and trend the status of each job, detect potential issues, and implement corrective measures before they affect product yields. Overall, EATON NOVA Optima HD from EATON NOVA is an ideal solution for semiconductor foundries who are looking for increased productivity, superior implant uniformity, and improved product quality. This next-generation implanter and monitor combine advanced source and monitor technology, intuitive control software, and robust process control capabilities in a single platform, all of which enable customers to quickly and reliably achieve the highest levels of performance and reliability in their production lines.