Used EATON NOVA / AXCELIS Optima HD #9311204 for sale
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ID: 9311204
Wafer Size: 12"
Vintage: 2007
High current implanters, 12"
2007 vintage.
EATON NOVA / AXCELIS Optima HD is a state-of-the-art ion implanter and monitor designed to help your semiconductor processing operations run smoothly and efficiently. With up to 60 kW open field operation and a wide range of beam scanning speeds, AXCELIS Optima HD can reach high depths of implantation with high throughput. This lets you perform complex implants that are critical for device performance quickly and accurately. EATON NOVA Optima HD's patented Dual Beam Scanning System allows for precise beam control, including frequency, spot size, power, and dose. It's also equipped with an AI-driven TransVoltage Control System (TVCS) to adjust the voltage regimes for optimized implant control. By matching the selected implant recipes to the actual trial conditions on the wafer, Optima HD minimizes out-of-range ions while still providing the desired recipe results. EATON NOVA / AXCELIS Optima HD also features an advanced Auto Ionization Control that keeps ions stable by tracking and correcting the variations that occur during implantation due to temperature, pressure, etc. It has built-in process monitoring and records of wafers products, which provide important feedback and allow you to better control and optimize processes while maximizing efficiency. AXCELIS Optima HD is equipped with a High Resolution Monitor to visualize ion implantation in real-time and make sure the process is following the specified recipe. The monitor allows you to fine-tune implantation parameters and provides comprehensive data for statistical process control. It also allows you to easily spot any implantation defects, such as holes, spikes or distorted waveforms, and automatically adjust settings to correct them. Built to industrial safety specs, EATON NOVA Optima HD comes with an impeccable safety system, including a safety interlock and emergency stop buttons. It also has a maintenance-free ion source, so you don't have to worry about regular maintenance or replacement costs. Optima HD also has PTW-4GB software that includes standard recipe development tools, detailed analysis and reporting, and an intuitive operator interface. In short, EATON NOVA / AXCELIS Optima HD is an advanced and reliable ion implanter and monitor with cutting-edge capabilities. It is ideal for semiconductor processing operations as it allows for precise and efficient implantation with optimal process control and minimal maintenance costs.
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