Used EATON NOVA / AXCELIS Optima HD #9353491 for sale
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ID: 9353491
Wafer Size: 12"
Vintage: 2010
High current ion implanter, 12"
No Hard Disk Drive (HDD)
2010 vintage.
EATON NOVA / AXCELIS Optima HD Ion Implanter & Monitor is an advanced and reliable ion implant machine designed for the most demanding requirements of the semiconductor industry. It is a robotic-assisted equipment that enables high-end implantation to deliver excellent yields with high precision. AXCELIS Optima HD utilizes a vacuum system that includes an integrated and automated pressure and temperature management unit. This implanter also utilizes a high-voltage power supply and an advanced magnetron source design to improve ion implantation accuracy and performance. In addition, the integrated electronic control machine helps to ensure a consistent dose control throughout the implantation process. EATON NOVA Optima HD is equipped with an advanced beam line and an automated beam transport tool. This ensures a precise and efficient delivery of implanted ions. The machine is also designed to minimize dead zones and improve implant uniformity. Optima HD monitors and records every step of the implanting process, allowing operators to view data in real-time. The tool also allows operators to automate certain processes, such as the control of implant parameters and the selection of implant conditions. This allows users to maximize their production and ensures the best possible yield from each implanted wafer. EATON NOVA / AXCELIS Optima HD ion implanter is designed to meet the most stringent industry requirements and offers high-end implantation performance. It is capable of implanting a wide range of ions, including q-type ions, high-energy ions, and low-energy ions. Its integrated laser interlock asset ensures maximum safety, and the machine is ISO 22301 and USIOC-N10 certified. AXCELIS Optima HD has been designed and developed to meet the highest standards of quality, delivering high-performance implantation solutions for advanced semiconductor applications. Its reliable ion source, advanced beam line, automated transport model, and integrated monitoring and recording capabilities make it an excellent choice for the demanding requirements of semiconductor manufacturers.
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