Used EATON NOVA / AXCELIS Optima HDX #9282114 for sale

EATON NOVA / AXCELIS Optima HDX is an ion implanter and monitor technology used in semiconductor device fabrication. It is a high-voltage, direct-drive ion implanter that is designed to provide superior speed, reliability, and accuracy when implanting ions into IC structures. AXCELIS Optima HDX is used for critical processing steps in the semiconductor device fabrication process, such as dielectric layer deposition, source implantation and heavy doping. EATON NOVA Optima HDX works by loading doped ions from an ion source into a plasma accelerator, which then accelerates the ions to high energies and directs them to the desired substrate with precise accuracy. This source-to-substrate transfer is usually accomplished by a series of pulse and sweep magnetic lenses, which result in a narrow beam optimized for a given layer of material. Optima HDX features advanced control algorithms that limit off-target deposition and control the post-implantation ion-beam trajectory. This ensures accuracy and repeatability in device fabrication. EATON NOVA / AXCELIS Optima HDX also offers advanced monitoring systems that can measure and track the ion implant process. These systems use a variety of sensors, such as current sensors, pressure sensors, and position sensors to measure the characteristics of the ions and substrate layers in real-time. This ensures that the ion dose, ion velocity, and ion beam size are optimized for a given application. AXCELIS Optima HDX is tested for superior reliability and accuracy. Its advanced monitoring systems have been engineered to provide precise control of the ion beam and ensure the highest level of performance. EATON NOVA Optima HDX can operate in the most efficient manner possible to provide enhanced quality, throughput and yield. All in all, Optima HDX is a highly advanced and sophisticated direct-drive ion implanter and monitor, designed to precisely control the ion implant process and provide optimum accuracy, speed, and reliability. With its advanced and optimized features, EATON NOVA / AXCELIS Optima HDX is perfectly suited for the demanding requirements of semiconductor device fabrication.