Used EATON NOVA / AXCELIS Optima HDX #9355276 for sale

EATON NOVA / AXCELIS Optima HDX is an ion implanter and monitor that is used for the production of semiconductor devices. It is an advanced tool that provides both high-speed implanting and precise monitoring of the implantation process. The equipment is equipped with a proprietary beamline and a high-end implantation head combined to provide a wide range of implantation characteristics. AXCELIS Optima HDX can produce a wide range of ion species and dose ranges, with the choice of wattage, pulsing and beamline tunability. This allows for greater control of the implantation process, providing the user with more variation in implantation parameters and a more productive implantation session. EATON NOVA Optima HDX features a patented trilayer closed loop monitor, designed to provide all the necessary feedback that implanters need to precisely control their implantation sessions. The monitor is capable of collecting data on the implanted wafers, and is equipped with advanced filters to detect any anomalies in the implanter parameters while ensuring accuracy of data. Optima HDX also includes multi-stage automation, including software to enable easy and automatic operation of the system. The unit includes automated batch programming for large numbers of wafers, and integrated statistical process control for improved yield rates. Additionally, EATON NOVA / AXCELIS Optima HDX machine includes a variety of safety features that ensure the safety of personnel and equipment. This includes a safety interlock tool, which prevents any implantation procedure from being started unless all safety parameters are met. The asset also includes self-diagnostics to detect hardware and software errors, and an advanced contamination control model that detects and eliminates airborne particle contamination. AXCELIS Optima HDX is a powerful and highly reliable equipment that offers advanced implantation control, a wide range of implantation characteristics, and powerful monitoring features, allowing for consistent and reliable results. This system can help improve implantation yields and reduce costs, making it ideal for commercial semiconductor manufacturing.