Used EATON NOVA / AXCELIS Paradigm XE #9241296 for sale

EATON NOVA / AXCELIS Paradigm XE
ID: 9241296
Wafer Size: 12"
Vintage: 2005
System, 12" 2005 vintage.
EATON NOVA / AXCELIS Paradigm XE is an ion implanter and monitor designed to ensure precise and accurate ion implantation. AXCELIS Paradigm XE is a high-performance ion implanter and monitor which provides optimum flexibility and efficiency for a variety of semiconductor processes. It is ideal for production control at 300 mm wafer sizes, with a maximum acceleration voltage of up to 80 keV. EATON NOVA Paradigm XE features a unique multibeam equipment for uniform distribution of particles across the surfaces of wafers. This is achieved through the use of a minimum of eight individual implanter gun beams. Each of these beams has a separate drive mechanism, which allows the user to accurately control both beam intensity and scan velocity with full range adjustability. Additionally, a wide range of advanced process controls, such as ultra-stepper beam control, are available with this system. Paradigm XE is engineered with a variety of safety and environmental features. The unit is designed to meet the most stringent standards in terms of particle emission, and is compliant with current industry standards. The unit also utilizes advanced filtration and limited source interaction mechanisms. Key to the performance and success of EATON NOVA / AXCELIS Paradigm XE is the integrated electronics package. This package includes an advanced repeatable implantation control unit as well as a range of monitoring and optical systems. The integrated electron transport machine is designed to ensure the most efficient results, while the optical monitoring tool provides real-time feedback to the user. Overall, AXCELIS Paradigm XE is an advanced ion implanter and monitor designed to deliver optimum performance. By utilizing the latest in particle beam technology, the unit ensures consistent and accurate results, while offering a wide range of process control options. The integrated electronics package ensures reliable and repeatable implantation performance, while the advanced filtration mechanisms ensure low particle emission levels. In short, EATON NOVA Paradigm XE is an ideal high-performance solution for semiconductor applications.
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