Used EATON NOVA / AXCELIS Paradigm XE #9282115 for sale
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EATON NOVA / AXCELIS Paradigm XE is a wafer-processing equipment designed for ion implantation. This system is capable of processing complex and advanced materials for semiconductor manufacturing. It combines traditional ion implantation with self-regulating technologies for robust performance. AXCELIS Paradigm XE unit offers total accuracy and control from the first wafer to the last with a high-end monitor, allowing users to make quick and accurate changes to the machine in real time during operation. EATON NOVA Paradigm XE utilizes a high power beam source, enabling the tool to achieve a maximum dose rate of up to 15 kW. The source also offers exceptional dose uniformity and homogeneity across the entire wafer area, while allowing for exceptional dose ranges. This asset comes equipped with a large-scale, two-stage rotary valve for precise control and customization of the dose rate. Additionally, the beamline of Paradigm XE is designed to maximize processing speed, control the beam energy spread, and accommodate a wide range of beam technologies. EATON NOVA / AXCELIS Paradigm XE's integrated monitoring model offers users superior visibility and accuracy. It offers a feedback control equipment for exceptional accuracy, along with a fully automated gas-monitoring system to provide real-time feedback and maintain accurate gas levels. As well, a programmable controller can be used to set up the unit quickly for different applications and materials. The controller is also used to ensure that the correct conditions and recipe parameters are met in order to achieve the desired results. Finally, AXCELIS Paradigm XE offers top-notch safety features, such as a full safety shut-off machine in case of an emergency. As well, it is equipped with dual-stage alarms in order to effectively alert the user in the event of a tool malfunction or any other abnormalities. In conclusion, EATON NOVA Paradigm XE is a powerful ion implantation and monitoring asset designed for the semiconductor industry. With its exception dose rate and control, integrated monitoring model and safety features, Paradigm XE provides the highest levels of performance and is capable of producing the best results possible.
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