Used TEL / TOKYO ELECTRON / NEXX Stratus S300 #9302388 for sale

TEL / TOKYO ELECTRON / NEXX Stratus S300 is a precision lithography equipment designed to produce high-quality photoresist patterns on semiconductor substrates. It provides an efficient way to create complex microelectronic devices with speed and accuracy. TEL Stratus S300 includes a multi-beam lithography head and a 4-point high-resolution stepper motor, as well as a high-precision substrate stage with optional multihole exposure capabilities. The system provides 0.18 micron resolution using a KrF excimer laser beam, with the exposure wavelength set to 248nm. A unique self-alignment feature ensures that all exposure operations are aligned correctly. The unit utilizes a multilayer scanning mechanism to ensure high accuracy and fast product throughput rates. It can accommodate up to eight substrates of up to 8" in size, with a maximum substrate thickness of 0.6mm. The machine provides an ultrafast exposure speed of 2.4sec/shot for a 1.2mm square area. It also includes a high-performance wafer handler that feeds a substrate from the cassette loader in the correct orientation and position. NEXX Stratus S300 combines high accuracy pattern generation with improved pattern uniformity, image resolution and high throughput rates. It also provides an advanced process control tool with real-time optimization of exposure conditions and machine performance. The asset can reduce substrate non-uniformity and optimize exposure parameters, ensuring minimal environmental impact, excellent imaging quality and repeatable results over extended runs. Overall, TOKYO ELECTRON Stratus S300 is an innovative and highly accurate photoresist model that can produce high-quality photoresist patterns with a minimum of fuss or waste. Its advanced features make it an ideal tool for producing complex microelectronic devices with speed and accuracy.