Used CANON EX4 #9242644 for sale

CANON EX4 Wafer Stepper is a high-performance wafer lithography equipment designed to handle a variety of production needs. This system is ideal for wafer-level packaging and other photolithography applications. It has a modular design that includes a high-precision XY positioning stage, an exposure unit, and a throughput controlling device. The XY positioning stage of EX4 has a high resolution of 0.2 μm and a repeatability of 0.1 μm, providing superior accuracy and repeatability in the placement of lithography elements. The stage consists of a two-stage machine, with a low-level stage for coarse movements, and a high-level stage for fine adjustment. The motion control technology is based on the company's proprietary Servo4 Motion Control Module. This helps to ensure smooth and accurate motion control throughout the wafer scan path. The exposure tool of CANON EX4 consists of a motor-driven mirror scanner, 30-kHz high-speed scanning and a high-power IR laser. It also features a two-axis synchronous scanning mode, allowing it to fully control the beam spot size and uniformity. The asset also has an optional optical aerial image measurement device that helps to ensure proper wafer exposure. The throughput controller of EX4 is the N-Controller. This device impacts the throughput rates of the model by adjusting pressurization and flow control settings. The controller has a timer setting that can be adjusted to achieve desired exposure times. Overall, CANON EX4 Wafer Stepper is an advanced wafer lithography equipment with a high degree of technological sophistication. It provides robust and reliable performance and is a great choice for a variety of wafer-level packaging and photolithography applications.