Wafer Steppers

Stepper, 8" SMIF (Reticle) Interfaced with TEL Act 8 Reticle size: 6" Mainframe: Operation Controller Main body Back chamber RASCO BCU-900 Temperature control unit 200 V, 3 ø, 40 A CYMER ELS6300 Laser unit 208 V, 50/60 Hz, 60 A ULPA filter I/F Module Tool box Currently stored in a cleanroom 2001 vintage.

i-Line Stepper machine, 6" Reticle: 5" Stored in a cleanroom 1991 vintage.

Stepper, 3" - 6" Broadband "G" + "H" line system Resolution: 1.0 microns Alignment: WAS key and target Automation or intelligent autoloader Air probe edge switches HP 362 computer with hard disk 1987 vintage.

Parts machine without laser or lenses.

Steppers, 6".

Wafer stepper.

Vacuum oven Temperature: 35° - 200°C P/N: 600121259.

Stepper 1997 vintage.

Steppers, 8" Reticle, 6" Applications specifications: Resolution: 0.45 µm Expose source: i-Line (365nm) Reduction: x 5 Expose field: 21.2mm x 25.2mm, 20mm x 20mm Alignment accuracy: 0.09 µm(3 Sigma) CD Uniformity: Max-Min <= 0.04um Lens distortion: +/- 0.05um Hardware configuration: Lens type: 5iB3S Prealignment orientation: 3:00 Wafer loader type: Type 1 (Std) Wafer type: Notched Reticle microscope compatiblity: 21.2mm / 22.0mm Cable length: 5.0 Meters Particle detector: No (Std) Pellicle particle detector (Pellicle only) Wafer edge exposure system: No (Std) Multi reticle changer: No (Std) Variable numerical aperture: 0.50-0.57 Selected NA: 0.50 SHRINC 1: No (Std) Reticle bar code reader Decnet AMS DP Software: No (Std) Online (OCS): NIKON SECSI / SECSII Performance analysis process (PAP): No (Std) Self-measurement program (SMP): No (Std) Wafer holder: Ceramic low contact type 1 (Std) FIA LIA Pre alignment 2: No (Std) Total overlay: Up to 20 NSR's Test reticle: R2205HA Ver.6.56 (6"-22.00mm) Chip leveling Extended library Extended wafer carrier table Low particle black ceramic wafer loader fixtures: No (Std) Inline: Left (Nikon standard layout) Detector: No (Std).

I-Line stepper, 8" Reticle microscope : Fixed HP LASER : 5517B LSA LASER : 5mW ITV Camera : Nikon original type OF Detection type : Nikon original type Wafer loader type : A1 Wafer carrier table : Left Reticle size : 6inch FIA PD Extension LIB Rack type : Left 1994 vintage.

Stepper.

Steppers MVS not included Currently crated.

Stepper, 6" Currently de-installed 1999 vintage.

Stepper, 6" Currently de-installed 1999 vintage.

Stepper, 5" Resolution: 0.65㎛ D.O.F: range ≥ 1.5 ㎛ Lens distortion: ≤±0.09 ㎛ Focus stability: ≤0.6 ㎛ Wafer flatness: ≤3 ㎛ Uniformity: ≤±2.0% Reticle rotation accuracy: ±0.02 ㎛ Overlay: |X| + 3σ ≤ 0.2㎛ EGA alignment accuracy: |X| + 3σ ≤ 0.14 ㎛ Stepping accuracy: 3σ ≤ 0.09 ㎛ Pre-alignment repeatability: 3σ ≤ 2 5㎛ Utilities: Electrical power: 200V±20 V, 3 Phase, 50 A, 50/60 Hz Air: ≥3 kg/cm2, 5 L/min, 1/4" Vacuum: ≤300 mmHg, 50 L/min, 1/4" PCW: 16°-32°C, ≥3 kg/c, 18 L/min, 1/2" Thermal exhaust: 1000L/min, 125mm Drain: 1".

Stepper PC missing Type-1 loader Chamber S810 1996 vintage.

Scanners.

Stepper.

Stepper, PC model NEST modify : MSC2 Software Version : 2.4D Reticle (5) Size Material : Quartz Thickness : 0.09" Changer type : Multi Wafer (6) Size Standard : JEIDA Orientation flat / Notch : OF Optical system Magnification : ( 1/5 )× Field size : (20.0×20.4mm) NA : ( 0.5 )~( ) Wavelength : i Line Illumination system Illuminant : Mercury lamp Exposure time control : integrating Exposure control Masking function Wafer loader Type : Type Ⅰ Reticle alignment Alignment light : Other(HeNe Laser, halogen lamp ) Type : CCD imaging, image treatment XY stage Type : Linear Motor Drive､triaxial interferometer Stroke : X( 200mm )~( )/Y( 200mm )~( ) Wafer leveling Type : Biaxial linear motor drive TV pre-alignment Type : Image treatment Reticle feeder (14 ) Sheet reticle storage Reticle particle inspection Type : Laser beam Unit name : PD5(Broken) Chamber Cooling type (air cooling) on T/C : S85L T/C Air cooling type : Cooling unit/inner Heater type T/C liquid cooling type : Cooling unit/inner Heater type T/C liquid-temp control unit : Stage Camera Type : CCD FIA LSA Inline : Stand alone 1992 vintage.

Stepper, 8" 1998 vintage.