Wafer Testing And Metrology

Automatic wafer circuit inspection measurement system, 3-axis Objectives: 10x and 50x DATACON Pentium 2 Tower computer 14" VIEWSONIC 15GS monitor Fiber optic light power supply VideoCMM II Software versions 2.01 on CD Screw-in pegs for lifting unit Passive Vibration Isolation Illumination Sources: 3 Channel digital light control Transmitted, incident and oblique lighting Resolution: 1, .5. or .1µ Repeatability: <1µ Accuracy: 3µ Field-of-view Resolution and Accuracy (using 100x objective): Resolution: .05µ Accuracy: .02µ or better.

Thickness measurement system, 6"-8" Non-Contact Wafer monitor for Sheet Resistance Digital data converter, model 20 03030 Does not include printer Power requirements: 100V, 1A, 1ø, 50Hz Measurement Range: 1m ohm/square to 1,999 m ohm/square Ω/mΩ Switch ( on rear of measurement head ) Power Switch ( rear panel ) Measurement head Wafer carriage Display Disk access door Main / Auto button Start / Standby button 1996 vintage.

Contamination monitoring station Photo voltage tester.

Profilometer.

Particle counter for LED (Sapphire) application.

Optical Profiler Interferometer Microscope TMC 63-222-6501 High-Performance Lab Table Components Included: (1) Wyko RST Interferometer Microscope (1) Wyko Optical Profiler Base w/ 6” x 10⅜” Stage (1) 0.62X Field Lens (1) 1.0X Field Lens (1) 1.5X Field Lens (1) Alignment Field Lens (1) RX2.5 Objective Lenses (1) RX10 Objective Lenses (1) RX40 Objective Lenses (1) External Light Source Unit (1) 37-Pin Wyko Control Box Ribbon Cable (1) 4’ Fiber Optic Light Source Tube Included in Light Source Unit: (1) 90nm-N.D. (1) 672.2 79nm-B.P. (1) 462.9nm 73.6nm-B.P (1) 501.7nm 10.3nm-B.P Light source: External Wyko Unit Stage: ±6° tip/tilt, ±90° rotation, ±2 in x,y Missing one 90° Elbow fitting for vibration dampening system.

CV plotter, 8" Hot Chuck Windows based Software (2) Neslab CFT-33 Chiller / Recirc units.

Electrical material.

CV Plotter, 6" Mercury probe.

Automatic resistivity probe Missing display board and one other board.

Particle inspection system.

Robot arms Part No. 353-071-0071 Arm: 022256-02 ASM P/N: 78-115406A05 Brief approximate: 2 Arm links: 8" Bottom diameter approximate: 10" Top mount flange size approximate: 12.5" Overall length approximate: 36.5" Power requirements: 110 V, 50-60 Hz.

Thin film measurement system Microspectro photometer head Wavelength range: 480-790 nm Measures from 400A to 40,000A.

Laser profilometer, topography measuring station, as-is with known computer problem. 100mm x 100mm x 50mm high scan travel.

Film thickness measurement system, 4"-8".

Inspection system Power: 110 VAC - 160 VAC 1989 vintage.

Automated long scan profilometer Optic: 150-600X HI Stylus Force: 0=: 226 10=: 339 40=: 557 100=: 840 300 µRange: 0.9975 Scan Length: 0.0000000 Backlash: 0 Drop Timer: 27 Linearity: A=: 975 B=: -350 Options: Sequence / Data Base Manager Option Motorized Level and Rotation Option Power Requirements: 115 V, 4 A, Single Phase, 60 Hz.

Surface profiler.

Measurement arm, 4" Control Station Platinum 4: Part no. CS-P0402-21 Touch screen computer 6-axis Soft check tool manager software with developer's kit CAM2 measurement software Computer support arm Mounting plate (1) 3 mm Zircon hard probe (2) 6 mm Zircon hard probe Granite rolling cart: Part no. ACCS0164 Granite surface plate with toe clamp inserts (2) Integrated FaroArm mounts Locking heavy duty casters Locking cabinet doors (52) Piece toe clamp set Magnetic mount (arm and FLT): Part no. SM029 Magnetic base Not included: Digital camera Computer.

Surface profiler Model number: 10-02000 Programmable X-Y stage 9" Video monitor (3) Operating modes: Manual Semiautomatic Automatic Scanning stylus: 12.5 Micron radius Zoom video microscope: 40x to 120x Magnification Vertical resolution: 5 Angstrom (with ±160 k angstrom range, 5 nm with ±160 micro-meter range) Vertical sensitivity: Measures even the smallest steps, 20 to 50 angstrom Horizontal resolution: 400 Angstrom Tracking force: User adjustable, 1 to 25 mg Maximum sample dimensions: 16.5 mm thickness, 162 mm diameter Power requirements: 90-130 VAC, 50/60 Hz, 120 VA max.