Wet Stations

Megasonic Quartz Bath, 2"x6".

Shell 96" (L) x 44" (D) x 76" (H).

HF wet station, 8".

Lot of equipment: 1,500 gal di water tank Filter beds RO's Water sofener tanks Hot water tank.

Wet bench, 12" Currently crated 2006 vintage.

Wet station, 8" AWB08 Sulfuric clean 2000 vintage.

Megasonic cleaners, 6".

System Wet type Sanding (1) Chamber.

Wet station.

Dip Etch System, 6", 2000 vintage.

Wet bench, 2007 vintage.

Wet process system, 8".

Wet bench, 400 V, 50 Hz 2008 vintage.

Wet benches.

Wet station, 2012 vintage.

Wet stations 2009 vintage.

Automated spray solvent system, 8".

Wet process system, 8" Type : CP / H2O2 Install type : Stand-Alone Process flow: L -> R Cassette interface : (2) Tec SEM integrated SMIF (50) Wafer batch loading Robot handler : Hauser Module configuration : Mod 1 (Process) : BSG ƒChem : H2SO4/HF 16:1 ƒTemp : 60°C ƒMaterial type : Quartz tank Mod 2 (Rinse) : QDR (Cold) ƒTemp : Ambient ƒMaterial type : PVDF Mod 3 (Clean) : Gripper clean (GC) ƒMaterial type : PVDF Mod 4 (Process) : PHOS ƒChem : H3PO4 ƒTemp : 155°C ƒER-OX : 40+/-8, PT-OX: 100 ƒER-SIN : 48+/-6, PT-SIN: 60 ƒU%-OX: 20, U%-SIN: 5 Material type : Quartz tank Mod 4 (Rinse) : QDR (Hot) ƒTemp : 50°C ƒMaterial type : PVDF Mod 5 (Rinse) : Final rinse (FR) ƒMegasonic option ƒMaterial type : Quartz tank Mod 6 (Dryer) : DMG ƒMarangoni IPA dry ƒMaterial type : PVDF Mod 6 (Aux) : Auxiliary place Mod 7 (Buffer) : PP Mod 8 (Transfer) : Transfer station Mod 8 (In/Out station) : In/Out ƒUI, CPU, Monitors ƒFire extinguisher system (Control panel) Chemicals: H2SO4 (PFA material) HF (PFA material) H3PO4 (PFA material) HCL (PFA material) IPA (SS material) Drains : Main : PVC, 50A Acid : PVC, 50A Alkali : PVC, 50A Industrial : PVC, 50A Reclaim : PVC, 50A Exhaust : Acid : PVC, 100A (Flange) Alkali : PVC, 100A (Flange) Solvent : PVC, 100A (Flange) Safety interlocks : Leakage sensor Temp Over temp Exhaust Sniffer Ultrasonic dry protect Heat exchanger Door sensors Light barrier Power requirements : 120/208VAC(12kVA), 60A, 3-Phase, 5-wire, Freq 60Hz UPS back-up power : 120/208VAC (8kVA), 23A, 3-Phase, 5-wire, Freq 60Hz 1997 vintage.

Wet stations.

Wet station Load CHCL Shower N2 blow DHF Q Etch EDR IPA Dryer Unload.