Wafer Handlers

Wafer sorters / optical character reading systems, 8" Table top type Scribe on backside (typically 12-15 characters) Close to notch Backside can be either bare Si or covered with dielectrics (SiO2, SiN).

Robot, 12".

EFEM with wafer handlers, can handle 8" and 12" simultaneously, (2) load ports Wafer Presenter/Handling Robot with 2 vacuum-holding wafer arms Robot Track (Y axis) Series 8 Robot Controller Robot Teach Pendant BROOKS2-PTN30R2-1-ES (Qty 2) BOLTS Load Port Modules BOLTS Load Port Module InLigner Wafer Aligner (Qty 2) Devicenet Interfaces CleanFlow Filter Fan Unit 3000FFU Keyence Light Curtain SL-C16H Kramer Tools Firewire Repeater/HUB Arista Industrial Touchscreen LCD Monitor Keytronic keyboard with trackball.

Loadports, 8", p/n 002-8700-02.

Robot 20 kg payload per arm 765 mm reach per arm (from centerline of base to tool mounting surface). 13 axes of motion (6 axes per arm) plus a single axis for base rotation Includes NX100 Controller, base cables and teach pendant.

Robot Can be upgraded.

8" wafer shipping boxes.

H-Square automated single wafer elevators, 6".

Input interface modules.

Wet Robot.

Electronic wafer transfer system Double stage.

Auto wafer transfer system, 6".

Robot, 7-sided.

RTG Crated, clean stored 2004 vintage.

Load ports, 12".

Robot (GENMARK), 6" P/N: 9900107161 For EVG 620 Aligner system Low hours 2001 vintage.

Wafer loader.

Wafer transfer systems, 8" Tabletop Vacuum-Free Horizontal Transfers Transfers with Mono Transfer Finger Automated Mapping of the Wafers within the Cassette Wafers are Handled by a Minimal Linear Contact on the Rear Side of the Wafer Pre-programmed Automated Transfer Options: Split, Merge, Compression, Randomization and Block Wafer Transfers Continuous Wafer Status/Position Monitoring by Optical Sensors throughout the cycle Compatible with most SEMI Standard Cassettes RS232 Port; SUBD25 Port 1996 vintage.

Sorter.

SMIF Loader.