Used ULTRATECH LSA 100A #9392624 for sale

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Manufacturer
ULTRATECH
Model
LSA 100A
ID: 9392624
Wafer Size: 12"
Vintage: 2006
RTP System, 12" 2006 vintage.
ULTRATECH LSA 100A is a fully automated, high performance wafer stepper for lithographic, circuit printing, and patterning applications. This equipment features an advanced, high-efficiency LED light source and a motorized stage which allows for fast and accurate wafer positioning. LSA 100A is capable of scanning patterned or unpatterned wafers to create circuit patterns. It utilizes step and repeat scanning technology to create standardized microstructures. This system has a programmable, variable slit and infinity tube combination to modulate reticle illumination with maximum lithographic control. The UV250 light source is adjustable with up to 80 Watts of light output. This makes it possible for users to select several beam shapes, improve depth of focus, and achieve a larger field of view. ULTRATECH LSA 100A offers a horizontal resolution of 0.75 µm with a maximum field size of 4 inch x 4 inch. The unit is equipped with a variable slit machine that can adjust the slit position for more precise illumination, enabling accuracy to 0.15µm. The infinity tube technology is designed to provide uniform, repeatable, and consistent illumination across the entire field of view. It also provides a significant dynamic range of exposure at low energy settings for finer patterns. LSA 100A is equipped with a movable stage which can be adjusted to fine tune wafer position and control cycle time. To ensure user safety, ULTRATECH LSA 100A is designed in accordance with a high standard of safety and environmental requirements that meet the requirements of SEMI and CE standards. It offers low vibration and low acoustic noise levels to ensure that the work environment is safe and comfortable. The tool is highly reliable and contains a reliable hardware and software architecture, utilizing robust and cost effective components. LSA 100A is a powerful, user-friendly, and cost-effective wafer stepper which offers a comprehensive set of features to enable precise and accurate lithographic results. It includes an adjustable UV250 light source, a programmable variable slit asset and an infinity tube to maximize lithographic control. The motorized stage offers fast and precise wafer positioning and the model meets the highest standards of safety and environmental requirements. ULTRATECH LSA 100A is an excellent choice for circuit printing and patterning applications.
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