Used JEOL JBX-9300FSZ #9236559 for sale

ID#: 9236559

Manufacturer:

JEOL

Equipment Details:

E-Beam lithography system
Cassette loader and control computer
Power racks and HV tank
Manuals and schematics

Features:
Gaussian spot electron beam: 4nm diameter
Accelerating voltage: 50 kV / 100 kV
Current range: 50 pA - 100 nA
Scan speed: 50 MHz
Vertical range automatic focus: ±100 µm
Vertical range manual focus: ± 2 mm
ZrO With thermal field emission source
Vector scan for beam deflection
Maximum 300 mm (12") wafers with 9" of writing area
Line width writing at 100 kV: < 20 nm
Field stitching accuracy at 100 kV: < 20 nm
Overlay accuracy at 100 kV: < 25 nm.
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