Scanning Electron Microscopes

Scanning electron microscope, 12".

Critical dimension (CD) measurement systems, 12".

Scanning electron microscope (SEM) Stage (3) Load ports (2) Racks 2001 vintage.

Critical dimension scanning electron microscope (CD-SEM).

Scanning electron microscope.

FE Scanning electron microscope (SEM), parts system.

SEM with Kevex detection unit.

SEM Windows 7 upgrade Scanning system DISS 5 standard edition/communication USB 2.0 Hardware: X-/Y-scan, 2 analog signal inputs without counter inputs Software: without mapping and enlarged point measurement/line scan 19" rack (containing the electronics), 10 HU without housing, without desk Backplane and power logic with interlock system Central USB 2.0 interface for control and communication Plug-in card with 8 bipolar current sources (Beam alignment, image shift, stigmator) Plug-in card with X-/Y-scanning power amplifier / current sources (Magnification coarse/fine, scan rotation, tilt correction X/Y filament image) Plug-in card for objective and 2 condensor lenses / power current sources (focus coarse, fine, spot size) Plug-in card with 8 analog unipolar/bipolar control outputs /voltage (gun: HV, filament emission, SE: contrast, brightness, grid; aux: contrast brightness) 2.9. Power supplies for electronics, lenses and coils SE-amplifier module (Amplifier with offset; adjustable 1,5 kV for PMT, power supply SE-preamp SE-high voltage module (10-12 kV scintillator-high voltage and adjustable grid voltage Control module for gun-high voltage of SEM (Control of HV, filament, emission, emission current measurement, optional: power supply) Adaption of the vacuum and HV interlock of the SEM to the interlock-system of the SEM-upgrade (Vacuum-gun-HV-interlock; Stage SE-HV-interlock) 19" rack fitting in the SEM housing Schottky Thermal Field Emission (TFE) source Point-to-point Resolution of <3nm* High Beam Current. (10pA to >100na) Improved low voltage (1kV) performance TFE “Schottky” Source PC controlled. Reduced Downtime and Cost of Ownership Fully reversible AND transferable upgrade Kit for variety of Tungsten (W) SEM models including JEOL, Hitachi, FEI, Zeiss and others. External and internal magnetic shielding 30 KeV Schottky Field Emission Source Mechanical Assembly: x1 Thick walled stainless steel chamber One Schottky Field Emission Gun Unit Differential pumping tube and UHV valve Internal mu-metal shield 55 I/s ion pump and power supply (optional) External mu-metal shield YPS High Voltage Power Supply: Remote high voltage supply unit with: Fibre optic link High voltage cable with Discharge Management YPS Schottky Field Emission Gun Unit: Pre-aligned™ YPS Schottky field emission module (HV-30) YPS Software Interface: USB interfaced fibre optic output to the remote YPS HV power supply Software from the system PC to controland monitor the Schottky field emission module.

Stereoscope.

SEM.

Stereoscope With desk and light.

Screen printer 50mm - 460mm.

FIB System.

Scanning electron microscope (SEM) 2001 vintage.

Focused ion beam (FIB) system 2004 vintage.

Scanning / Transmission electron microscope (S/TEM) 0.34 nm point-to-point Resolution Gatan Tridiem 863 CCD 2k x 2k Camera Vacuum: diffusion pump with mechanical RP Gun: Schottky FEG 20 – 300 kV Automatic aperture system Imaging: STEM, HAADF, BF/DF 2k x 2k CCD Spectroscopy: Edax EDS Gatan 863 Tridiem Holography (Bi-Prism, and Gatan Holoworks) Lorentz Tomography (FEI SW and tomography holder) EFTEM EELS Lens control Sample holder: Single tilt compustage High visibility double tilt low background holder Tomography holder 2006 vintage.

Scanning Transmission Electron Microscope (STEM) OS: Windows Accessories: Cameras EDX Image filters (2) Holders: single tilt, double tilt Options included: GATAN MSC794 1K CCD (not installed) EDAX detector HAADF STEM detector EELS is not installed 2003 vintage.

CD SEM system, 8" Workstation: Model : B2600 O/S :HPUX Software Version : 18.35ev15 IP Read : 5.4~16.1pA(Low mode) CD measurement principle: Cursor and line profile measurement CD measurement range: 0.1 to 2.0 um Secondary electron image resolution: 3nm Image magnification: SEM image; 500 x 300,000 Optical microscope image; about x110 Specimen stage: Movement range X and Y: 0-200mm Stage drive: Pulse motor Control and speed: max. speed 100mm/s Wafer loader: Wafer transfer from cassette to loader chamber: Auto transfer via wafer transfer robot Wafer transfer from loader chamber to stage: Auto evacuation and auto loading Wafer transfer robot system: random access using (2) cassettes Wafer detection in cassette: Auto detection via wafer searcher Chucking method: Vacuum chucking on back of wafer Orientation flat/ V notch detection: non-contact auto detection via optical sensor Electron Optics: Schottky emission type Accelerating voltage: 500 to 1600V Lens system: Electromagnetic condenser lens system, booster objective lens Secondary electron detection: Scintillator/ photomultiplier detection system Objective lens aperture: Heating type movable aperture Scanning coil: 2-stage electromagnetic type (X, Y axes) Probe current monitoring: Faraday cup incorporated, with automatic measurement function Optical microscope: 1.2 mm square visual field, monochrome image Control and display system: Viewing control CRT: 21 type monitor Scanning modes: TV scan, HR scan, SLOW scan Image processing: Software processing using filtering Saftey device: Equipped with emergency off switch CD measurement data processing system: File storage Storage media: Hard disk (2GB), 3.5 type magneto-optic disk, 3.5 floppy disk Data processing function: statistics scanning using worksheet system Printout: 80-character thermal printer Evacuation system: Evacuation principle: Full automatic dry & clean evacuation Vacuum pumps: (3) Ion pump, (2) turbo molecular pump, (2) oil rotary pump Safety devices N2 Gas source (for leak): Gas pressure: 200 to 660 kPa Outside Diameter of connecting tube: 6um Compressed air source (for valve drive) Air pressure: 600 to 880 kPa Outside diameter of connecting tube: 6mm Vacuum source (for auto loader) Vacuum pressure: P= 1.3 to 21.3 kPa Outside diameter of connecting tube: 6mm. VIPS and Cognex are missing Currently warehoused 2000 vintage.

CD Scanning electron microscope, parts system Main body C to C Display unit Power unit.

Critical dimension scanning electron microscope (CD SEM).