Used KLA / TENCOR 5200XP #9167259 for sale

KLA / TENCOR 5200XP is a wafer testing and metrology equipment that is part of KLA 5200 line of metrology products, as well as their flagship line of electron backscatter diffraction (EBSD) systems. KLA 5200XP is specifically designed for production metrology environments, providing optical metrology capabilities to quickly measure the thickness, stress, and structure properties of chips or wafers. The system uses a high-speed spatial light modulator (SLM) to project and detect images onto the wafer surface, enabling it to precisely and accurately measure various characteristics of a wafer. Directional light, including oblique and angled light, is used to improve critical area measurements and reduce artifacts. To enhance the unit's accuracy and repeatability, the light source is constantly scanned across the wafer surface. TENCOR 5200 XP offers cutting-edge systems, processes, and analytics to ensure the highest quality wafers. It is capable of automatically detecting and diagnosing major and minor defects, while accurately measuring critical parameters such as etch depth, die-width and thickness, fine linewidths, stress profiles, and more. Additionally, the machine offers a comprehensive suite of analytics software, which allows users to quickly detect aberrations, identify trends, and understand root causes of defective chips or wafers. KLA / TENCOR 5200 XP is built to support parallel testing, with four independent measurement channels measuring multiple wafers at once. The precise and advanced optical alignment ensures that the tool consistently produces accurate data, and low-power consumption ensures high reliability. 5200 XP is also capable of precise chromatic correction, providing greater accuracy in color measurement and allowing for faster scan times. In summary, KLA 5200 XP is an advanced wafer testing and metrology asset designed specifically for high-speed production environments. Its highly precise optical model, powerful analytics capabilities, and parallel measurement channels ensure precise and accurate measurements. This equipment is capable of quickly and accurately measuring critical areas, including etch depth, die-width, and stress profiles, making it an ideal choice for chip and wafer production.