Used KLA / TENCOR 5200XP #9205818 for sale

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ID: 9205818
Overlay measurement system.
KLA / TENCOR 5200XP is a highly advanced wafer testing and metrology equipment, designed to meet the requirements of the most demanding fabrication production environments. KLA 5200XP allows users to achieve maximum coating thickness uniformity and wafer-level performance. TENCOR 5200 XP consists of a wafer carrier, an optical surface inspection module, and a wafer measurement module. The wafer carrier is designed to be compatible with all popular wafer sizes ranging from 1" to 8" in diameter, enabling measurements across a wide range of substrates. This system also features independent temperature and humidity control, allowing users to perform measurements regardless of production environment conditions. The optical surface inspection module includes both metrology and 3D imaging capabilities, allowing for detailed analyses of films and surfaces. The advanced imaging technology used in this module allows for quantification of surface composition and structure, as well as observation of film thickness and defects. In addition, the module allows for automated defect detection and diagnosis. The wafer measurement module offers users a full range of physical and electrical measurements with precision accuracy and high repeatability. This module includes measurements for thickness, electrical properties, step height, and flatness. The module also includes several high-speed measurement algorithms for enhancing unit throughput, minimizing measurement time and improving data quality. Finally, 5200 XP is designed with a user-friendly graphical interface, allowing users to easily setup and perform measurements and to control the various modules. Direct data acquisition to a file is easily performed, as well as data conversion to a variety of formats. In addition, 5200XP can be easily integrated into an existing manufacturing machine, allowing for seamless data transfer and analysis. Overall, TENCOR 5200XP is a highly advanced wafer testing and metrology tool, designed to meet the requirements of the most demanding production environments. With its multiple modules and precision measurement capabilities, this asset provides users with a reliable and accurate solution for all of their wafer testing and metrology needs.
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