Used KLA / TENCOR 5200XP #9279019 for sale

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ID: 9279019
Overlay measurement system With SMIF.
KLA / TENCOR 5200XP Wafer Testing and Metrology Equipment is a high-end wafer inspection system specifically designed for the semiconductor device fabrication industry. KLA 5200XP offers advanced optical metrology, precise defect detection, and precise 2D and 3D measurements. This unit is capable of rapidly inspecting over 24 different topographies of imaging to detect emerging nano defects. Its laser interferometer in a patented design helps maintain very precise optical metrology alignment and accuracy, which provides a reliable foundation for accurate defect detection, 3D profile measurements and imaging. TENCOR 5200 XP wafer testing and metrology machine is equipped with a class 1000 cleanroom-compatible environment and the latest 5-axis scan head, which is capable of sustainably imaging at high speeds in all features with 4 quadrant precision scanning. 5200XP features a powerful microscope with a zoom field of up to 300 that effectively inspects and focus features down to below 10nm. Utilizing Computer Vision technology, KLA / TENCOR 5200 XP accurately measures every parameter with maximum accuracy. Paired with a novel pattern recognition tool, KLA 5200 XP can quickly detect and measure any type of defect with its statistical positive-defect (SPD) algorithm. The asset also includes a high-end software suite with an intuitive Graphical User Interface (GUI). With the combination of user adjustable statistical settings and flexible inspection criteria, the GUI can be tailored to specific needs and Provide users with the capability to monitor in-process control from start-to-finish. In addition, the highly customisable 5200 XP includes real-time defect tracking, a unique and advanced data extraction feature and a powerful reporting module. Real-time image/data analysis and reporting capabilities of TENCOR 5200XP ensures quick corrective action when needed. KLA / TENCOR 5200XP is an easy to operate yet powerful tool that provides model flexibility that is needed by semiconductor device technicians. From fast and accurate defect detection to multiple topographic imaging, KLA 5200XP Wafer Testing and Metrology Equipment is an essential tool for providing reliable inspection results.
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