Used KLA / TENCOR 5300 #9350994 for sale

KLA / TENCOR 5300 wafer testing and metrology equipment is a multi-axis, automated scanning system that can be used to measure multiple properties of wafers including their geometrical characteristics, photos, film thickness, electrical properties, film stress, and charge. This unit is designed with a suite of automated tools and software that can measure, locate, and quantify wafer defects. Each of these functions have been designed to operate on a variety of substrates ranging from 6" to 300mm wafers. KLA 5300 includes a high-speed, laser-based scanning head with a patented beam switching capability that allows for rapid switching between different laser wavelengths while scanning. This unique design enables precise measurement of the samples' surface properties, performance, and uniformity at the same time. The machine also includes photovoltaic imaging devices, which use monochrome cameras to capture images of physical defects, trenches and production material non-uniformities, while the onboard surface metrology tools measure film thickness and properties such as film stress and mobility. TENCOR 5300 is equipped with an intuitive user interface and software-controlled instrumentation that simplify setup and operation. The tool displays 3D displays of images and can be used by the operator to quickly locate and measure flaws in the sample. The asset is designed to be user-friendly and can be easily configured and programmed to meet the individual needs of users. 5300 is built with the most reliable and modern technology and features a highly durable and reliable physical casing. It also features an automated model for sample tracking, traceability, repeatability and reproducibility. This ensures that each measurement is accurate and repeatable over a large number of samples. KLA / TENCOR 5300 offers unprecedented levels of flexibility and precision in its measurements and is constantly being improved and updated with the latest technology. Its latest upgrades include its ability to measure high temperature and pressure, high speed, larger area samples, and ultra-thin film measurements. These features make KLA 5300 an ideal choice for use in wafer testing and metrology.