Used NANOMETRICS Atlas #9221857 for sale
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ID: 9221857
Wafer Size: 6"
Vintage: 2006
OCD Metrology system, 6"
ATLAS-M Analysis platform
P/N: 1000-01046 Rev B
Single ASYST load port
Tool upgraded
With particle contamination cover in 2016
Parts non-functional:
Polarizer
Torret: 4x - 15x
2006 vintage.
NANOMETRICS Atlas is an automated wafer testing and metrology equipment that is designed primarily for use in semiconductor fabrication and research facilities. The system is capable of measuring a wide variety of parameters and features on wafers of various sizes with accuracy and repeatability. The unit features a high-resolution CCD detector and can measure various slopes, etch pits, topography, grain structure, and other wafer features in highly precise detail. The core of the machine is Atlas Metrology Station. This is a modular tool comprised of a Focal Plane Array Imaging Asset (FPA), a pair of slit-projector imaging systems, a reflectance scanner, a laser interferometer, and an optical profiler. These components enable NANOMETRICS Atlas to provide unprecedented precision for measuring features as small as 500 microns in diameter, at extremely fine resolutions of 0.1 nanometers. The model is capable of performing simultaneous measurements on multiple wafers with its easy to use user interface. The user can choose the type of measurement to be done on each wafer, with automated requirements that select the correct combination of parameters for precision measurement. Atlas can store data and results on its secure, networked equipment and can interface directly with other tools in the fabrication process. For further analysis, NANOMETRICS Atlas includes specialized software for generating a variety of diagrams and statistical reports, as well as an integrated graph plotting feature. It is also capable of integrating with other networked tools, such as data analyzers or statistical software, to further increase its utility. Atlas is a powerful system and is designed to meet the needs of the most demanding semiconductor fabrication and research facilities. Its combination of precision measurement capabilities, network connectivity, and intuitive user interface make it an ideal unit for any lab in need of high-performance metrology.
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