Used RUDOLPH / AUGUST AXI-935 #9275463 for sale

ID: 9275463
Wafer inspection system.
RUDOLPH / AUGUST AXI-935 is a powerful mask and wafer inspection equipment designed to identify and prevent production defects. The system offers a range of advanced features, such as dual-beam non-contact imaging, high-speed edge scanning, low-magnification wafer scanning, and automatic defect classification. The unit utilizes a 350mm wafer stage and is capable of measuring wafer sizes of up to 8 inches in diameter. The AXi machine is equipped with two beams - one for bright-field and the other for dark-field imaging - that are capable of producing images at very high resolution. The beams can be adjusted to perform inspections from both the front and rear of the wafer. This feature allows the tool to identify defects even at the nano-scale level. The asset also features a low-background, low-kV imaging model that enables it to detect subtle defects that traditional imaging techniques may have missed. For defect classification, the AXi equipment utilizes a high-speed pattern recognition system. This technology can identify and classify even the most complex surface defects with pinpoint accuracy. The unit also offers automated feature recognition, which makes it easy to identify repeatable defects quickly and accurately. Furthermore, the AXi machine features a high-speed edge scanning tool that can precisely measure samples in both x- and y-axes. This enables the asset to provide excellent dimensional accuracy and positional accuracy. A highly precise encoder model allows the equipment to accurately track mask position and calculate the exact size and shape of defects along with the roughness of the surface. Finally, the AXi system boasts an intuitive user interface, allowing users to customize settings and optimize unit performance. It also offers enhanced safety features to protect the operator and samples from hazards. All these features make AUGUST AXI-935 an ideal machine for quickly and reliably detecting defects on wafers and masks.
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