Used RUDOLPH / AUGUST AXI-S #293634919 for sale

RUDOLPH / AUGUST AXI-S is a high-performance mask and wafer inspection equipment designed for semiconductor manufacturing. It combines high-speed scanning and positioning accuracy with advanced high-resolution optics to provide a reliable and robust system for identifying and inspecting defects in masks and wafers. The unit is capable of accurately detecting and measuring defects at ultra-high resolution, providing the highest level of mask and wafer quality assurance. AUGUST AXI-S features an innovative 3-D illumination machine with a high-speed line-of-sight camera. Its maximum speed is up to 100 images per second and its maximum resolution is up to 6 μm. Its imaging tool uses three-dimensional omnidirectional imaging technology to capture full-field surface data. This data is then automatically analyzed and correlated to defect identification information, including SEM images. The asset also offers easy front loading and unloading of wafers and a wide array of wafer sizes, from 200mm to 8-inch. In addition, the model has an advanced defect inspection capability. It is equipped with a wide array of detection algorithms, including shadow imaging, visual defect detection, surface signature, image processing and extreme pattern recognition. The equipment is also capable of autonomous operation and can be easily integrated into existing production flow and automation for higher efficiency. RUDOLPH AXI-S also offers many additional features such as automated pre- and post-processing, precise defect reduction, and full wafer-fabrication analysis capabilities. Furthermore, with its modular design, it can be easily adapted to specific application needs and customer requirements. Overall, AXI-S is a reliable and powerful mask and wafer inspection system, offering advanced features and capabilities that enable the highest quality assurance and yield with the most efficient process implementation. With its high-speed, high-resolution optics and advanced defect detection algorithms, it ensures that semiconductor manufacturing takes place with maximum efficiency and accuracy.