Used RUDOLPH / AUGUST AXI-S #9220042 for sale
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ID: 9220042
Vintage: 2006
Advanced wafer inspection system
Automatic data collection and reporting
With wafer handler
Inspection camera: 1.8MB Monochrome CCD
Review camera: 3CCD Color
Defect sensitivity: 0.5 Microns (User adjustable)
2006 vintage.
RUDOLPH / AUGUST AXI-S is a highly advanced mask and wafer inspection equipment and engineering tool. It is designed for fully automated inspection of masks and wafers for the semiconductor industry. The system is capable of inspecting multiple levels of masks and wafers with high accuracy and repeatability, enabling quick and efficient checking of various technological features. The unit utilizes advanced imaging technology, such as digital cameras and laser scanners, for the inspection process. The camera captures the image of the mask and wafer patterns and sends the image to the software for analysis. The software then performs various tests, such as pattern identification, defect printing, and overlays of drawings, to generate an accurate picture of the inspected item. In addition to its imaging technology, the machine also employs powerful algorithms and signal processing techniques to accurately detect defects. It is capable of inspecting multiple levels of masks and wafers, including both planar (flat) and 3D (spatial) masks and wafers. It can detect sub-pitch and line width variations, which may cause electrical shorts, and check for erosion, exposure, and pattern alignment. Its advanced imaging technology and sophisticated algorithms enable the tool to quickly and accurately detect potential defects. The asset comes with a comprehensive data management model that allows users to track the results of their inspections. Through the data management equipment, users can store and retrieve past test results, which can be used to compare various batches of product. This feature enables users to quickly detect any changes in their products and detect any potential quality deviations. Overall, AUGUST AXI-S is an innovative and powerful mask and wafer inspection system and engineering tool that is designed for a wide range of semiconductor applications. Its advanced imaging technology and powerful algorithms, combined with its comprehensive data management unit, make the machine ideal for detecting the smallest possible defects in a short period of time.
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