Used RUDOLPH / AUGUST AXI-S #9245775 for sale
URL successfully copied!
ID: 9245775
Wafer Size: 12"
Vintage: 2005
Wafer inspection system, 12"
2005 vintage.
RUDOLPH / AUGUST AXI-S is an advanced mask and wafer inspection equipment designed to provide precise measurements for yield analysis in each process step. It can identify hidden defects, allowing users to spot potential quality risks before they become catastrophic. AUGUST AXI-S system has three main parts: an examination station, an imaging unit, and analysis software. The examination station features a sixRUDOLPH AXI-S motion and positioning machine, built-in optics, electric motor, and precision stage. The imaging tool can detect both topographic variations and defects on the surface of a sample. It consists of a 3.5 mega-pixel CCD camera, LED lighting control, and magnification optics. AXI-S can measure a wide range of parameters on the sample surface, such as thickness, resistivity, etch rate, shape, and profile. The data to be measured is collected by scanning the surface. The analysis software then processes this data into information useful for evaluating quality and yield. The asset is designed to be easy to use and highly accurate for measuring small structures. It can identify both surface and sub-surface defects, and with its multi-function capability, can measure on materials such as glass, silicon, polymers, and metals. For controlling quality, RUDOLPH / AUGUST AXI-S has several features such as software-controlled optics, shutter control, light source selection, variable viewing angle, and auto-focus mode. Additionally, the model includes accessories such as XY-Z stage, auto-correction equipment, and parametric testing module. These are used to improve accuracy and facilitate efficient operation. With its high accuracy and flexibility, AUGUST AXI-S can save time and money for users by increasing yield. In addition, data from the system can be used for further yield analysis, making it an ideal tool for yield improvement.
There are no reviews yet