Used RUDOLPH / AUGUST AXI-S #9270886 for sale

RUDOLPH / AUGUST AXI-S
ID: 9270886
Wafer inspection systems.
AUGUST-RUDOLPH / AUGUST AXI-S is a specialized mask & wafer inspection equipment designed to check for defects in two-dimensional (2D) electronically-scanned masks and three dimensional (3D) wafers. It uses a combination of unique optical imaging and computer-based analysis to detect sub-micron size defects in printed or etched patterns on the surface of wafers and masks. AUGUST AXI-S system consists of a custom designed optical microscope, an image dicing device, a serial port, a scanner, a display monitor, and a computer processor with associated software for image capture, dicing, and analysis. During an inspection, an illuminated sample surface is scanned over a small area with a wide-field microscope. Using a combination of visible-light and ultraviolet (UV) light sources, the optical microscope captures digital images of the pattern at multiple angles and magnifications. The images are diced into tiles by software and examined to localize any defects. The images are then analyzed using specialized algorithms to locate and classify defects. In addition to inspecting masks and wafers, RUDOLPH AXI-S unit also has the capability to capture images and patterns in real time. This is done by the use of a real-time imaging machine, consisting of a camera, an encoder, and a frame grabber. With this feature, images can be acquired from different sources simultaneously, enabling simultaneous comparison of patterns and defects. In addition, the tool provides advanced features such as automatic image capture, pattern recognition, defect confirmation, and real-time statistical analysis. Finally, AXI-S asset is designed for maximum accuracy and efficiency, and to meet the most demanding quality requirements. It is highly resistant to mechanical shock, vibration, and magnetic fields, and has the ability to adapt to various sampling environments. With its advanced technology, RUDOLPH / AUGUST AXI-S model can detect sub-micron size defects in both wafers and masks. And with its user-friendly interface, it is easy to use and operate.
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