Used RUDOLPH / AUGUST AXI-S #9401136 for sale

RUDOLPH / AUGUST AXI-S is a comprehensive mask and wafer inspection equipment designed to meet the stringent requirements of process control in the microelectronics industry. The system offers full automation with property measurement features and advanced process control capabilities. The unit is composed of two main parts: a 4AUGUST AXI-S, precision XY stage and an embedded vision machine. The 4RUDOLPH AXI-S, precision XY stage utilizes linear motors to achieve high speed movement and can accurately move objects in the X, Y and Z directions with a resolution of 0.1 μm. This stage also has a built-in robot arm with a maximum speed of 1mm/s and a force capacity of 1,500N. The embedded vision tool uses the latest intelligent image recognition technology and allows for simultaneous multi-flash image processing. It provides a wide field of view and can detect even the most challenging defects and patterns. The asset provides accurate and reliable measurement data for all types of masks and wafers, including thin, thick and ultra-thin phases. The measured data is further processed for statistical trend analysis and process optimization. The model also offers comprehensive software, which is designed to provide a user-friendly GUI for real-time image display and multi-step operations. It supports live image capturing, image manipulation and image analytics and analysis. The software enables process control with various complex operations. The equipment also offers the flexibility to integrate with existing systems. In addition, it is equipped with advanced features such as NIST synchronization, OCR pattern recognition, dual channel alarm and PLC control. All of these features allow users to monitor and customize the system's performance. AXI-S is a cost-effective and versatile mask and wafer inspection unit that is designed to meet the highest production requirements. It offers reliable and accurate measurement data and process control with various complex operations. This machine is a perfect solution for high-volume microelectronics production.