Used RUDOLPH / AUGUST NSX 115 #9394174 for sale

RUDOLPH / AUGUST NSX 115 Mask & Wafer Inspection Equipment is a high-precision, high-throughput system designed to provide inspection of continuous mask and doubly patterned reticle applications. The unit is equipped with a 5MP Square CCD camera and is capable of 8um low-k1 and 10um high-k1 inspection resolution. The camera is mounted on a Z-axis to allow for full Mask Depth of Field (MDoF) capturing of 3D mask geometry while the machine is also capable of providing high-resolution 2D Top-View mask inspection. In addition, multi-projector 3D Overlay allows manual Confidassure Tool scoring and algorithmic detections to be performed in-line. The asset hardware is controlled by the SofTec machine vision platform to enable easy customization and data handling with superior speed and flexibility. This allows users to easily switch between inspection operations, enabling the convenient support of multi-format tools such as Amplification, Subtraction, Double-Difference, Overlay and Complex Overlay with multiple layers. In addition, software packages are available for specialized applications such as 2D Image Analysis, Reticle Edge Inspection, Line Edge Roughness, MEF, Focus Measurement, Measurement Integrity and Repetitive Defect Analysis. AUGUST NSX 115 is designed for 24/7 performance with features such as Mask Slide Change, Defect Correction, Cross-Site Report Evaluation, Online OCR and Report Coding. It is also designed to minimize operator intervention and maximize yields, with a multitude of process control features such as Mask Load Strategy, Intricacy Map, Defect Management, Online Analysis and Pre-Cleaning. By combining software features with the powerful 5MP CCD camera, RUDOLPH NSX 115 provides the highest retention rate even when confronted with high false defect rates and is capable of producing highly accurate inspections with low cycle times. Overall, NSX 115 Mask & Wafer Inspection Model provides an industry-leading solution for high-precision, low-defect rate inspection for continuous mask as well as double patterned reticle operations. By combining the powerful 5MP CCD camera, the SofTec machine vision platform and a multitude of supporting software, RUDOLPH / AUGUST NSX 115 is capable of providing reliable, high-throughput and accurate inspections.