Used RUDOLPH / AUGUST NSX 115 #9395408 for sale
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ID: 9395408
Wafer Size: 6"-8"
Vintage: 2010
Automatic Optical Inspection (AOI) system, 6"-8"
GENMARK Gencobot 8/2L
PC
2010 vintage.
RUDOLPH / AUGUST NSX 115 mask and wafer inspection equipment is a semi-automated system for inspecting semiconductor masks for defects. AUGUST NSX 115 provides quick, efficient wafer and mask inspections for low resolution imaging and up to 4µm resolution imaging where manual inspection is too time-consuming. The unit comes with a wafer stage for inspecting up to eight 200mm dia. wafers at high speed. It also features an adjustable Mask Insight Machine MAG PIE that provides autofocus capability over multiple pads as well as a high-resolution optical tool that works with 400p/mm lens to detect even the finest defects. RUDOLPH NSX 115's software is simple and intuitive. It includes a drag-and-drop interface with easy-to-use dialogue boxes for programming inspection jobs. The asset includes three modes of operation: wafer inspection, wafer inspection with focus adjustment, and mask inspection. Wafer and mask inspections are completed quickly and easily with up to 1,000 wafer inspections per hour. For user convenience, the model offers a range of image capture features including synthetic aperture imaging, digital video zoom, and lightening, as well as image enhancement capabilities. NSX 115 also features automated pattern recognition and identification. The equipment can be integrated with an AGV robot for loading and unloading of wafers and masks, as well as an external off-line analysis station for saving and archiving inspection data. These features, along with the system's compact design, make it ideal for a wide range of tasks, particularly those related to wafer and mask inspection. In addition, the unit is designed to meet the demands of customers in a variety of industries. As a result, RUDOLPH / AUGUST NSX 115 can meet the needs of the most exacting users in the field of semiconductor mask and wafer inspection.
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