Used RUDOLPH / AUGUST NSX 115D1 #293598225 for sale
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ID: 293598225
Automatic Optical Inspection (AOI) system, 12"
With auto handler
Robot
PC
2010 vintage.
RUDOLPH / AUGUST NSX 115D1 is a comprehensive mask and wafer inspection equipment designed to offer rapid, high resolution inspection and scalability for a range of applications from semiconductor mask inspection to critical high-resolution inspection and defect detection. This system features a fully automated inspection sequence, an Autoalign feature for the mask's luminescence, and a full-contrast enhanced image display for high magnifications. AUGUST NSX 115D1 is equipped with 25 magnification settings from 6X to 900X, with 5X to 100X available for quick, low magnification inspections, and 8X to 900X for detailed inspecting and defect analysis. A mix-and-match inspection capability and quick changes between tool sets are additional features that provide greater flexibility when inspecting masks and wafers. The unit also has four high-performance digital cameras to capture the image data of inspect and analyze the masks or wafers. RUDOLPH NSX 115 D 1 is designed to offer exceptional defect detection capabilities. It is capable of detecting or indicating defects that may be as small as 0.2 microns and as large as 8 microns. The machine offers both low and high contrast detection, and a high-end multi-layer detection tool ensures the clearest possible images by displaying a range of image resolutions to reduce image noise. The asset includes two advanced image processing algorithms for super-resolution required for high-performance inspection and the ability to process low-contrast, high-resolution images. Additional features such as zoom in/out, manual focusing, local area scanning, and measurement capabilities allow for better inspection and analysis. In terms of mask or wafer inspection, NSX 115 D 1 can identify voids, opens, shorts, burrs and other defects. With its Autoalign feature, it is able to align mask patterns in the substrate with an accuracy of 2μm or less. The model also inspects texture, highlighting particles, distortions, edge mapping, and clear/distorted patterns that may be undetectable by the optics and cameras. RUDOLPH / AUGUST NSX 115 D 1 is a reliable and simple to operate mask and wafer inspection equipment that offers maximum accuracy and control for a wide range of applications. With its unbeatable performance, superior features, and advanced design, the NSX 115D is the ideal solution for any semiconductor manufacturing process.
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