Used RUDOLPH / AUGUST NSX 320 #9243740 for sale

RUDOLPH / AUGUST NSX 320
ID: 9243740
Wafer Size: 8"
Vintage: 2013
Automated defect inspection system, 8" 2013 vintage.
RUDOLPH / AUGUST NSX 320 is an automated mask and wafer inspection equipment designed to provide fast, accurate, and repeatable analysis of lithography-based test devices. The system utilizes advanced nanometrics of the Automatic Defect Detection and Counting (ADDC) software to quickly and accurately detect and quantify defects in production wafers and masks. The unit is designed to detect and quantify microscopic defects in the masks and wafers. AUGUST NSX 320 provides precise measurements of wafer thickness, critical and overlay, image quality, fill factor, and pitch measurements, as well as topographical defects. The innovative automated machine reduces time and increases efficiency of testing devices. The tool utilizes a single camera design with dual view illumination angles, a variable field size, and a caliper based focusing asset, providing accurate image capture and analysis. The model's advanced algorithms are able to detect and identify site sites, isolated defects, and complex defects with repeatable accuracy and minimal manual intervention. The software features process conditions and defect recognition support, view finding process, automatic defect counting, automatic histogram and size distribution analysis and automatic defect detection. RUDOLPH NSX 320 is designed for ease of operation with Plug and Play capability, intuitive graphic user interface (GUI) and automated batch processing. The equipment supports up to 8 wafers of different sizes per batch. Additionally,Users can define and save recipes to capture and store process recipes and settings, to be easily reused for repeatable and optimized testing. The system complies to SEMI E134 standard, and can be customized to meet the needs of customers. Overall, NSX 320 is an advanced, automated mask and wafer inspection unit designed for fast, repeatable, and accurate analysis of test devices. The machine features an innovative single camera design for advanced defect detection, intuitive GUI, automated batch processing, Plug and Play capability, and advanced analytics. RUDOLPH / AUGUST NSX 320 provides reliable, repeatable, and consistent measurement image data to support device fabrication, semiconductor production, and research and development.
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