Used RUDOLPH / AUGUST NSX 3DI AXI / UltraPort5 #9233701 for sale

RUDOLPH / AUGUST NSX 3DI AXI / UltraPort5 is a mask and wafer inspection equipment designed specifically for high-resolution patterning applications in the semiconductor industry. This instrument can detect defects in etched patterns on mask slices and wafers with unparalleled accuracy and repeatability. The 3DI architecture utilizes advanced optics to achieve a dynamic imaging angle adjustment of up to 5° between the light source and the image plane - allowing for the precise inspection of patterns with top angles up to 80°. This system has a detection rate of up to 5 μm at 3σ for defects resulting from photolithography processes, allowing for the detection of even the most minute defects. The proprietary photo-vacuum illumination unit also significantly reduces fluctuations in camera images caused by particle dust. AUGUST NSX 3DI AXI / UltraPort5 has an intuitive UI interface that makes it easy to use and control, while its modular design allows the machine to be tailored to meet customer's specific needs. RUDOLPH NSX 3DI AXI / UltraPort5 also incorporates an innovative and robust wafer registration tool, with automatic sample positioning and orientation. This asset ensures that each inspection is carried out accurately and reproducibly, while at the same time anticipating wafer buckling effects. The model also provides an optional "movie" mode, which allows for the inspection of moving targets, such as dynamic defect clusters, as opposed to static defect patterns. In addition, this equipment offers an Electron Beam Inspection component which significantly increases the defect coverage of the 3DI AXI / UltraPort5. This feature enables manufacturers to inspect entire mask & wafer pattern sets in just a few seconds, increasing throughput and reducing costs. The 3DI AXI / UltraPort5's superior processing power allows for simultaneous mapping and review of up to four wafers, while its' large 7.5" LED displays provide a clear imaging interface for easy identification of defects. NSX 3DI AXI / UltraPort5 is an ideal combination of cutting-edge technology and intuitive design for mask & wafer inspection. It is capable of detecting tiny defects with unprecedented accuracy, while its modular design and intuitive interface make this system not only simple to use and maintain, but also highly cost-effective.