Used RUDOLPH / AUGUST XPORT #293644799 for sale

RUDOLPH / AUGUST XPORT is a sophisticated and precise mask and wafer inspection equipment. It is designed to handle both large and small- batch production needs. It provides non-destructive wafer inspection and mask inspection capabilities utilizing advanced capabilities such as X-ray scattering, optical scatterometry and 3D profile measurements. The XY-axis stage of the system is a robust linear motorized stage for precise and reliable wafer and mask positioning. The Z-axis of the unit enables precise height adjustability on a nanometer scale. An advanced imaging and illumination machine is integrated into the tool, which enables precise and accurate acquisition of 3D image data with a resolution of 0.25 to 0.75 µm. The integrated optical asset is capable of three modes of data acquisition, namely: surface inspection, wafer and mask inspection; shadow images; and 3D profile data acquisition. It also provides automated surface imaging and defect analysis. It includes a high performance vision electronic model for advanced stage controls and for controlling the imaging and measurement systems. The integrated data acquisition software provides easy access and control of all parameters and enables the user to excellently analyze and track the image data. The equipment is highly adaptable to changing customer requirements and various applications. It can be easily installed at the customer site and is fully supported by a service team. AUGUST XPORT is a sophisticated mask-wafer inspection system for accurate and high-resolution data acquisition. It offers an advanced imaging and illumination unit, XY and Z-axis staging, and high speed vision electronics. With intuitive data analysis and display software, it provides one of the most efficient mask and wafer inspection systems available in the market.