Used OXFORD VG 80H #9173169 for sale
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OXFORD VG 80H is a fully automated molecular beam epitaxy equipment offering great flexibility for the deposition of controlled-thickness, high-quality III-V and II-VI materials. VG 80H provides two separate heads for deposition of layers of up to four materials and high-definition deposition parameters for epitaxial growth. Fully integrated with the docking station for installation and process development, the system provides the user with direct access to the deposition chamber and protective environment. The deposition source of OXFORD VG 80H is based on the pulsed electron beam source (PEB), enabling a wide range of growth parameters to be selected without compromising the surface morphology. The PEB source has adjustable pulse amplitude, repetition rate and frequency, making it possible to control the ion density and dwell times to create advanced structures. The nitrogen and arsenic Gun systems provide advanced control over the composition of the deposited layers. Temperatures up to 1000°C can be achieved, allowing for many advanced processing techniques such as growing graded or super lattice structures. The two heads provide the user with flexibility for exploring materials and process design to ensure the best film deposition has been achieved. VG 80H has a computer-controlled automation unit for material deposition, allowing for precision control over the growth parameters for the epitaxial film. The automated machine gives the user the flexibility to grow multiple layers of different materials, in different thicknesses and densities. The automated growth tool also allows for doping by active control of the nitrogen and arsenic guns, enabling the user to control the in-situ doping and hence the electrical properties of the film. The asset also offers advanced monitoring of film composition and quality through in-situ reflection high-energy electron diffraction (RHEED). This provides stability and feedback for the desired and actual growth results. The data from the detectors can be reviewed over time to ensure changes in the process can be tracked and optimized. OXFORD VG 80H is designed to be reliable and maintenance free. With a technically advanced design, it is a reliable model for use in both the research and industrial environments. This makes it ideal for production of advanced III-V and II-VI material growth.
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