Used VEECO Gen II #293773662 for sale
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ID: 293773662
Wafer Size: 3"
Vintage: 1982
Molecular Beam Epitaxy (MBE) system, 3"
Materials: Al, Ga, In, GaTe, Be, As, Sb
Auxiliary chamber
Growth chamber: (2) Shrouds / 8-Cell ports
Manual wafer transfer
Manual valve
Load Lock chamber
Water cooled manipulator with heater, 3"
(8) Effusion cells, 2"
(4) Upward looking effusion cells
InALGaAs with Si / Be
(3) Ion pumps
(2) Cracker Cells
(2) Automated valve positioners
(2) Ion pumps / Controllers
(3) Sorption pumps
QMS
6-Wafer load lock
O2 Plasma source
Cracker cells: H2S, H2S3
EUROTHERM Temperature controller
PC
1982 vintage.
VEECO Gen II molecular beam epitaxy (MBE) equipment is an advanced thin film deposition tool that is designed for the epitaxial growth of compound semiconductor materials with high precision, purity, and control. MBE is a key technique for semiconductor device fabrication, enabling the growth of ultra-thin layers of materials with atomic-level precision. Gen II system is the second generation of MBE systems developed by VEECO Instruments Inc., a leading provider of advanced thin film deposition and measurement solutions. Building on the success of the original Gen I unit, VEECO Gen II offers enhanced performance, advanced features, and improved reliability for cutting-edge research and production applications. One of the key features of Gen II machine is the ultra-high vacuum (UHV) environment in which the epitaxial growth process takes place. The UHV environment is essential for minimizing the presence of impurities and contaminants, ensuring the high purity of the deposited thin films. The tool is equipped with a sophisticated pumping asset, including cryo-pumps and ion pumps, to achieve and maintain the required vacuum levels for MBE processes. VEECO Gen II model also features a high-temperature effusion cell, which is used to evaporate elemental sources such as arsenic, gallium, and indium. These elemental sources are supplied in the form of solid rods or powders, which are heated in the effusion cell to produce a molecular beam of atoms that condenses on the substrate surface to form the epitaxial layers. The effusion cell temperature can be precisely controlled to adjust the flux of material and optimize the growth conditions for specific material combinations and layer structures. Moreover, Gen II equipment is equipped with multiple shutters and beam flux monitors for controlling the deposition rate and thickness of the epitaxial layers. The shutters are used to selectively block or allow the molecular beams from reaching the substrate, enabling precise control over the growth process. The beam flux monitors provide real-time feedback on the flux and uniformity of the deposited material, allowing for accurate monitoring and adjustment of the growth parameters. In addition to its advanced deposition capabilities, VEECO Gen II system features a comprehensive control and monitoring unit that allows users to create and execute complex growth recipes with ease. The machine is equipped with a user-friendly interface for programming growth sequences, setting deposition parameters, and monitoring key process variables in real time. Advanced software algorithms enable automatic optimization of the growth conditions for achieving desired material properties and device performance. Overall, Gen II molecular beam epitaxy tool represents a state-of-the-art tool for researchers and device manufacturers seeking to develop high-quality semiconductor materials and devices with precise control over material composition, layer thickness, and crystal quality. Its advanced features, high reliability, and user-friendly interface make it a valuable asset for a wide range of research and production applications in the fields of nanotechnology, optoelectronics, and semiconductor device engineering.
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