Used VEECO Gen II #9194612 for sale
URL successfully copied!
ID: 9194612
Wafer Size: 3"
MBE Growth system, 3"
AlGaAs Laser
InGaAsP
Vacuum:
Growth chamber (GC)
Triode ion pump: 400 l/sec
Buffer chamber (BC)
Triode ion pump: 200 l/sec
(2) TSP Controllers
Loadlock chamber (LC)
(100) CTI Cryotor cryopumps
(2) Vacshorption pumps
Ventury pump
In situ and calibration tools:
RHEED System: 0-10 keV
RHEED Oscillation growth rate calibration system
Cells:
EPI
Valved cracker with valved controller
Cable
Riber three zone
P Valved cracker with valve controller
Power supply
(3) 400g Sumo cells Ga, In, Al
(2) Dopont cells
Dual electronic equipment rack, 19"
(12) Solenson DC power supplies
2704 Dual channel
Eurotherm controller
Substrate and heated station
(2) DC Power supplies
Substrate heater
Heated station
Other tools:
Ircon optical pyrometer
Growth chamber and beam flux
(2) GP Ion gauge controllers
Buffer and loadlock chamber
RHEED Power supply
RGA Power supply unit
TEK Scope
Riber P valved cracker valve controller
Riber P cracker power supply
Pyrometer port heated
Substrate manipulator controller
Loadlock chamber
Lamp power and controller
AGILENT / HP / HEWLETT-PACKARD / KEYSIGHT Chart record mounted
RHEED Oscillation recording
Trolley for substrate handling.
VARIAN / VEECO GEN II molecular beam epitaxy (MBE) equipment is a ground-breaking technology used for research and development of high-quality semiconductor materials. It provides exceptional levels of control, precision and accuracy for the production of these devices to ensure optimal performance and reliability. The system includes VEECO GEN II MBE Processor for material doping, deposition, and growth of structures. The processor is designed to achieve ultra-high vacuum environments and operate a broad range of substrate and sources configurations. The unit also includes the optional AE VEECO Long Body Source, which provides high power and excellent homogeneity of the molecular beam, allowing accurate and precise MBE results. The following mainunit components are included: 1. Vacuum Chambers - The main chamber is designed to work under ultra-high vacuum environment, allowing deposition and growth of materials layers with excellent uniformity and atomization. 2. Substrate Sources - A number of sources are available, depending on the materials and standards required (cystalline/amorphous, etc). For improved accuracy, optional reference and destination sources can be used for optimized growth levels. 3. Source Configurations - The source configurations include ion source, electron-beam source, reactive source, and embedded source to accommodate variousMBE processes. 4. Process Control - Variable-rate process control allows precise adjustments to the substrate deposition or growth rate. An optional Autotune module is available for improved process control, as well as improved productivity and cost savings. 5. Sample Alignment - The sample alignment machine provides precise and repeatable positioning of the wafers and their layers for optimal uniformity and accuracy. 6. Vacuum Monitoring - The tool monitors levels of pressure, temperature, and residual gases using the in-situ hygrometric and deposition cells, analyzers and gauges. VARIAN GEN II MBE asset offers user-friendly design and intuitive controls for fast setup and operation. The model is also offered with various configurations, depending on specific requirements. By utilizing the latest MBE technology, the equipment is capable to deliver optimum precision and accuracy for superior quality and reliability.
There are no reviews yet