Used NOVELLUS Equipment for sale

Novellus Systems, Inc. was a leading global supplier of innovative solutions for the semiconductor manufacturing industry. With headquarters in San Jose, California, Novellus was renowned for its cutting-edge technologies that enabled the fabrication of advanced integrated circuits and other microelectronic devices. Novellus offered a broad range of products that catered to various stages of the semiconductor manufacturing process. These included state-of-the-art deposition systems, such as the VECTOR platform, which employed chemical vapor deposition (CVD) and atomic layer deposition (ALD) techniques. Designed for high-volume production, these reactors provided exceptional film quality, enhanced step coverage, and precise control over film thickness and composition. In addition to deposition systems, Novellus also provided a comprehensive suite of etchers/ashers. The ALTUS platform offered excellent process flexibility, enabling deep reactive ion etching (DRIE), plasma-enhanced chamfer etch, as well as planarization and photoresist stripping. This range of capabilities satisfied the stringent requirements of various applications, including logic devices, memory chips, and micro-electromechanical systems (MEMS). Moreover, Novellus was known for its groundbreaking sputtering systems. The SABRE series represented a paradigm shift in physical vapor deposition (PVD) technology, balancing high productivity with superior film properties. From alloy sputtering to strong adhesion and low-resistance copper deposition, these systems facilitated the production of advanced metal interconnects and multilayer structures vital to building next-generation integrated circuits. Overall, Novellus was respected not only for its diverse product portfolio, but also for its continuous focus on advanced process development and customer-centric solutions. By pushing boundaries and anticipating market trends, Novellus solidified its reputation as a leading producer in the semiconductor industry, empowering customers worldwide to stay at the forefront of technological innovation.

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