Used KLA / TENCOR SFS 6420 #9017662 for sale

KLA / TENCOR SFS 6420 Wafer Testing and Metrology system is a state-of-the-art system for measuring and analyzing advanced semiconductor technology devices. KLA SFS 6420 is built on an integrated hardware and software platform that provides a variety of inspection tools to achieve robust process control and yield management. TENCOR SFS 6420 utilizes a 300mm wafer inspection tool to measure and analyze a variety of parameters, including defect detection, topological features, mask alignments, and overlay accuracy. It is able to analyze wafers with thicknesses from 200μm to 12.6μm, loaded onto a robotic arm for zoning and movement. Utilizing cutting edge optics technologies, SFS 6420 is able to assess high-resolution die maps and any other topological features. KLA / TENCOR SFS 6420's defect detection technology is able to detect and identify features of interest, such as dislocations, grains, particles, irregularly-shaped pits or holes, and features too small to be resolved by the naked eye. Its high sensitivity also allows detection of minute particles that are introduced during processing. KLA SFS 6420 can capture subtlties in the wafer surface to allow for further analysis and evaluation of defect sizes and density. When measuring mask alignment and overlay accuracy, TENCOR SFS 6420 utilizes powerful overlay metrology for assessing parametric variations in alignment between two features on the same wafer or between two dissimilar wafers. It is able to detect subtle misalignment between different structures, not visible under conventional optical microscopes. This gives an immediate feedback on the variations between the layers and helps to identify any processing issues for failure analysis or yield improvement. SFS 6420's software platform, WinSFS, ensures comprehensive control of the measurement process, from recipe parameter setup to the display of measurement results. It also offers various data acquisition and analysis tools for further data processing. Additionally, its user friendly interface makes it easy to access for wafer inspection and metrology needs. In summary, KLA / TENCOR SFS 6420 Wafer Testing and Metrology system is an advanced measurement tool capable of analyzing wafers with high-resolution and accuracy. Its comprehensive software platform provides a user friendly experience for controlling inspection and metrology processes, defect analysis, and yield improvement.