Used AIO / RITE TRACK SVG 90 #293775031 for sale

Manufacturer
AIO / RITE TRACK
Model
SVG 90
ID: 293775031
Wafer Size: 6"
Coater / Developer system, 6" FTC Cabinet Main power GP Cabinet SVG GUI Rack controller cabinet SVG Chemical cabinet Chemical waste tank Wafer centering module (2) Coat modules (2) Develop modules (2) Load ports HMDS Module (3) Bake oven modules (4) Chill plate modules Qty / Description (16) / Shuttle bearings, SVG, linear 200-595 (4) / Belt timing SVG Dev dispenses ARM 6B16-37 (3) / Tebr cables chain,4MM Pitch 1.2O PD (4) / Cable chains, 103 Pitch (Belt) 204-020 (2) / Spin station boards (1) / Thermalogic temp control board / 121-180 (1) / Shuttle interface board 99-80267-01R (1) / Assy, thermo cutoff 99-23226-01 (1) / Motor, random shuttle drive 99-45467-01 (1) / Motor gear harness 99-47222-01 (1) / Marathon motor mod 5KH32GNB811AX (1) / Motor, spindle, 90S air assist 27-66286-01 (1) / Sensor, cassette (3) / RTD, 3 Wire 1/8 sheaths (5) / Optical sensor transmissive 0.512 (13MM" Z3204-ND (4) / PCB Assy, 80158 Single sensors SVG 99-80158-01 (1) / Cybor pump controller 506A (2) / Hot bake temp controllers (4) / 24 VDC Solenoid 114-1003 (4) / 24 VDC Solenoid 50 PSI 99-38539-01 (3) / Sprng, tors .048X270DEG 2.5IN LBS 211-150 (4) / Exhaust tube poly-bake 9.5 13287-01 (2) / Chuck, 90, Coater, 8" (2) / 21190-01 (4) / Kit, flowmeters 17-76280-01 (2) / Nozzles 2257-01 (2) / Cassette end station vacuum blades, short (3) / PIN, Centering devices 20770-01 (4) / PIN, Supporting 20769-01 (2) / Cassette shuttle vacuum blades, LONG 99-41467-02 (19) / Fuses 500 MA F2450-ND (1) / Vacuum bake thermocouple 121-208 (2) / Top side EBR Motor harness tebr 99-39825-01 (3) / Cybor 5116 pumps (2) / Procon pumps 105C240F51BD (1) / Flow meter 65MM EBR 1350GAL1AKFF1AAA (8) / Boat, entegris (8") K198-80MB-97C02 (4) / Solenoid valve assembly 99-23062-01 (3) / Vacuum solenoid, 24VDC 114-088 (4) / KIT, Humphrey valves, 4WAY, 2POS, 24VDC 17-77246-01 (1) / Power supply board 99-80268 (4) / Cable chains, 88 pitch 204-021 (3) / 24 VDC Solenoid 2WAY VALVE 114-102 (1) / SCR Power controller (1) / Hygroclip HC2-S standard climate probe (1) / Spindle motor controller 99-38892-01 (1) / Spindle motor controller 99-38891-01 (2) / Serial arm full assemblies 99-38154-02 (2) / Motors DC Servo 75V 1.5A 112-083 (2) / Pistons 203-148 (1) / Keyboard 90S CES 85-48094-01U (1) / Chamber LID VP/VB/HPO (1) / Rotronic humidity transmitter (1) / Assy, LCD Display 99-41844-01 (1) / PCB Assy,vacuum sensor 99-80170-01 (6) / Stations CPU BD 80166F.
AIO / RITE TRACK SVG 90 is a sophisticated photoresist equipment that plays a crucial role in the semiconductor manufacturing industry. This system is designed to provide precise and reliable patterning of photoresist materials on wafer substrates, enabling the fabrication of intricate semiconductor devices with high accuracy and resolution. AIO SVG 90 integrates various advanced technologies and features to support the complex lithography processes involved in semiconductor manufacturing. One of the key components of RITE TRACK SVG 90 unit is the track module, which is responsible for dispensing, coating, baking, and developing photoresist materials on the wafer surface. The track module is equipped with multiple spin coaters, which allow for uniform and controlled deposition of photoresist films with varying thicknesses. The machine also includes hot plates and chill plates for baking and cooling the coated wafers, ensuring optimal film properties and adherence. SVG 90 tool incorporates advanced automation and robotics technologies to streamline the photoresist processing workflow and maximize production efficiency. The asset is equipped with high-precision alignment and positioning mechanisms to ensure accurate overlay and registration of multiple lithography steps. This level of automation helps to reduce human error and variability in the manufacturing process, leading to improved yield and device performance. Furthermore, AIO / RITE TRACK SVG 90 model features a comprehensive software suite that enables users to program and control various parameters of the lithography process. The software allows for real-time monitoring and adjustment of critical process variables, such as spin speed, dispense volume, and bake temperature, to achieve optimal photoresist patterning results. Additionally, the equipment is capable of generating detailed process reports and data logs for quality control and traceability purposes. In terms of performance, AIO SVG 90 system offers high throughput capabilities, allowing for rapid and efficient processing of large batches of wafers. The unit is designed to meet the demanding requirements of high-volume semiconductor production facilities, where tight process control and consistency are essential for meeting quality standards and production targets. RITE TRACK SVG 90 excels in achieving high resolution patterning of submicron features, enabling the fabrication of advanced semiconductor devices with intricate geometries. Overall, SVG 90 is a state-of-the-art photoresist machine that empowers semiconductor manufacturers to achieve precise and reliable patterning of photoresist materials for the production of cutting-edge semiconductor devices. With its advanced technologies, automation capabilities, and performance characteristics, AIO / RITE TRACK SVG 90 plays a critical role in enabling the continued advancement of semiconductor technology and innovation.
There are no reviews yet