Used ALLIED SIGNAL ElectronCure 30X-150-A-II #167086 for sale
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ID: 167086
E-beam photoresist curing system, non-operational
Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist
Variable beam voltage 0-30 KV in 100V steps
Computer controlled, fully automatic
3" to 6" round wafers
4" x 4" square plates
Operates at 55 millitorr vacuum
De-installed.
ALLIED SIGNAL ElectronCure 30X-150-A-II photoresist equipment is designed for precise thermal processing of electronic packaging substrates, including multilayer boards, IC packages and lead frame orders. It utilizes advanced photochemistry based on proprietary resins combined with precise temperature and exposure settings for superior results. The system has a double sided exposure capability with both heating and cooling options up to 150°C. It is capable of producing both standard and custom images on substrates with features as small as 2 mil (50 µm). The machine is equipped with an advanced imaging unit such as an advanced PC-based pattern generator, halftone mask, binary mask and line art setting. The advanced direct imaging technology allows extremely precise adjustment of both exposure time and intensity. The temperature control unit maintains a precise temperature range on both sides of the substrate and thermally controls the exposure process to produce excellent results on substrates with varying thickness, texturing and features. ElectronCure 30X-150-A-II offers superior resolution and high-definition imaging for complex circuit boards and packages. The machine offers advanced versatility such as: automatic repeatability, uniform exposure, and easy-to-use operator controls. The entire machine is designed for reliable, repeatable exposures and long-term stability. Another important feature of the machine is resistance to outgassing. Outgassing is a common problem when processing semiconductor components such as IC packages and lead frames. The outgassing can affect the quality of photoresist line definition and result in defective features. ALLIED SIGNAL ElectronCure 30X-150-A-II offers a low outgassing rate for enhanced reliablity. Overall, the powerful and reliable ElectronCure 30X-150-A-II photoresist tool is ideal for commercial, industrial, and research applications that require high-precision thermal processing. It offers a wide range of exposure speeds and temperatures to achieve best possible resolutions and accuracy. The machine also provides excellent process repeatability and resists outgassing for reliable results.
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