Used ASML / SVG 90S #9197270 for sale
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ID: 9197270
Wafer Size: 8"
Vintage: 1995
DUV System, 8"
Model no: 9068
Top assembly P/N: 99-47302-01
Sub assembly P/N: 99-40407-03
Includes:
Interface block
SVG End station P/N: 99-48240-01, 9062
MICROBAR P/N: Trackmate
SVG Semifab precision air handler P/N: 224-203, RAM 2000/480/SVG
EPE Technologies transformer P/N: 8-77115-07
DONALDSON Carbon filter system P/N: P196160
Miscellaneous panels / Covers / Hardware
Power requirements: 208 VAC, 3 Phase, 50/60 Hz
1995 vintage.
ASML / SVG 90S is a photoresist equipment that utilizes a combination of deep UV imaging and light energy to create patterns on wafers. This system is designed for use in the semiconductor industry and provides exceptional accuracy and feature size reproducibility. SVG 90S is an evolutionary unit that offers the highest exposure wavelength accuracy and feature size repeatability available. It features an advanced optical assembly that delivers a full field of view with a tightly configured maximum numerical aperture. The machine combines an exposure projection imaging tool, advanced optical components, and a light source of choice to provide multiple levels of light energy intensity. ASML 90S utilizes a pattern recognition algorithm to match the light energy output to the projected patterns at each device level. This significantly improves accuracy and reproducibility of features. The asset is designed with a high-speed exposure algorithm which allows short exposure time and fast operating speeds. This can result in improved process reliability and optimization. The model is designed for efficient and accurate processing of small and large feature sizes. It also offers repeatable processes for critical layers. This is extremely important for the semiconductor industry when creating intricate fine-pitch features. 90S is extremely user-friendly with an intuitive graphical user interface and is certified for certified systems. It has integrated safety features for operator and equipment protection. In summary, ASML / SVG 90S is a high-precision imaging and light energy combination equipment that offers superior accuracy and feature size reproducibility. It combines advanced optical assembly components and a process algorithm to create intricate patterns accurately and efficiently. It has intuitive control and safety features that ensure reliable and safe operations. This photoresist system is an incredibly valuable asset for the semiconductor industry.
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