Used AXCELIS / FUSION R850 #9134042 for sale

AXCELIS / FUSION R850 is a photoresist equipment used in the semiconductor industry to produce circuit patterns on substrates. It is the most advanced resist strip tool available, providing a highly versatile platform to drive manufacturing innovation and performance. FUSION R850 utilizes advanced lithography and etch toolsets to enable multiple material resist strip applications. It features a hybrid Open-Loop/Closed-Loop Control system to accommodate complex process flows. The Open-Loop Control algorithm gives users greater control over the process flow by employing predictive control algorithms to compensate for wafer-to-wafer variances in photoresist exposure and etching performance. The Closed-Loop Control unit enables in-situ layer-to-layer metrology with real-time feedback to ensure repeatability and precision image resolution. At the core of AXCELIS R850 machine is FUSION proprietary Open Process Champion Technology. This software-driven analytics tool provides real-time analysis of process data and trends that can be utilized to refine recipes and reduce cycle times. This flexibility in process optimization paves the way for higher yields and greater control of the resist strip process flow. R850 tool supports a broad range of photoresist materials. The asset is capable of handling the micron-level microlithography processes used to produce semiconductor devices with features down to 20nm. Additionally, it offers optimal yields by employing advanced particle removal strategies and automated resist strip defect detection. This sophisticated photoresist model is designed to reduce cost, improve process flow, and increase yields. By optimizing recipes, AXCELIS / FUSION R850 equipment helps manufacturers produce semiconductor devices more efficiently while also improving the quality of the final product.