Used AXCELIS / FUSION R850 #9144806 for sale

AXCELIS / FUSION R850 is a high-performance photoresist equipment used for lithography processes. The system combines several features to deliver cost-efficient, reliable, and repeatable results for critical lithography applications such as advanced logic, memory, and display applications. It is designed to meet the most demanding global market requirements for wafer processing, and its easy-to-use graphical user interface provides research, engineering, and production personnel with the information they need to optimize the desired device characteristics. FUSION R850 features a high-frequency xenon-filled lamp, rapid TTL exposure control, superior high-precision machined optics, and an advanced environmental control design that enables users to accurately tune the unit. These components combine to provide a highly accurate photoresist machine with a high-density resolution capability of 5.1 microns on a 1kλ mask and a total tool uniformity of 0.5% or less. The asset also provides high contrast imaging for advanced IC designs and features a wide range of lens capabilities, including specialized processes such as contact lithography and single layer gate patterning. Additionally, the model incorporates automated endpoint detection and wafer loading capabilities, which minimize user intervention and enable production throughput increases of up to 30%. Its advanced exposure control equipment includes an optional dynamic GPSM module, allowing users to precisely manage system parameters in real-time, enabling the highest repeatability in results. To ensure maximum efficiency when processing wafers, AXCELIS R850 has an optional Loadlock, allowing users to transfer and store up to ten cassettes of wafers in the unit prior to programming, allowing for continuous operation without the need for operator intervention. Additionally, the machine also features a hot-swap cassette mechanism, which enables operators to switch out cartridges with wafers while the tool is in operation. The asset's compatibility with PCS Process Planning Software ensures optimal device characteristics and production yields when used in combination with R850. These features, combined with its reliability and cost-efficiency, make AXCELIS / FUSION R850 photoresist model the choice of many industry professionals requiring accurate lithography results and high-quality yields. Its superior features ensure that its users are well-prepared for the requirements of a rapidly changing global IC market.