Used BUHLER / LEYBOLD OPTICS Syrus Pro 1350 LION #293771029 for sale
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ID: 293771029
Optical coating machine
Stainless steel chamber
Optical monitoring system
(2) Polarization filters
Water cooled
Water distribution system (Warm / Cold)
Calorimetric water flow sensor
Electrical cabinet
Graphical User Interface (GUI)
TFT Touch screen, 19"
Uninterruptible Power Supply (UPS)
Remote service system
Material: Stainless steel
Vacuum pump
High vacuum flange size: DN500
Pumping capacity: 300 m³/h
Final pressure: 5x10-3 mbar
Cryo pump type: Coolvac 10000 iCL
Compressor unit type: Coolpak CP 6000
Gas flow range: 1.6-300 SCCM
LION 300 RF-Plasma source
Line voltage: 3 AC 400 V / 230 V
Frequency: 50 Hz
Substrate drive:
Adjustable speed range: 3-33 1/min
Rated power: 25 kW
Substrate load: 250 kg
Substrate heater:
Heater power: 52 kW
Temperature: 300°C
Chamber:
Inner diameter: 350 mm
Inner height: 1550 mm
Features:
Manual mode (Preparation service and maintenance) / Automatic mode (Machine / Process control)
Electron beam evaporator:
Deflection: 270°
Power: 6 kW
Crucible diameter: 320 mm
Floor space: 35 m²
Power supply: 10 kW, 13156 MHz, 1000 mA, AC 0-6 V.
BUHLER / LEYBOLD OPTICS Syrus Pro 1350 LION is a high-performance photoresist equipment designed for advanced semiconductor manufacturing applications. This system offers precise and reliable photoresist processing capabilities, making it an ideal solution for the fabrication of integrated circuits, MEMS devices, and other microelectronics components. At the core of BUHLER Syrus Pro 1350 LION unit is its advanced lithography technology, which enables the precise patterning of photoresist layers on semiconductor substrates. The machine features a high-resolution mask aligner with sub-micron alignment accuracy, allowing for the creation of complex and intricate patterns with exceptional precision. This capability is essential for achieving the tight dimensional tolerances required in modern semiconductor manufacturing processes. One of the key features of LEYBOLD OPTICS Syrus Pro 1350 LION tool is its ability to accommodate a wide range of photoresist materials, including both positive and negative tone resists. This flexibility allows semiconductor manufacturers to select the most appropriate photoresist for their specific process requirements, optimizing device performance and yield. The asset's compatibility with various photoresist formulations also enhances its versatility and applicability to diverse manufacturing scenarios. Syrus Pro 1350 LION model is equipped with an advanced UV exposure equipment, featuring high-intensity light sources and precise exposure control mechanisms. This ensures uniform and consistent exposure of photoresist layers across the substrate, minimizing variations in pattern quality and dimensional accuracy. The system's exposure parameters can be finely tuned to meet the specific processing requirements of different photoresist materials, achieving optimal patterning results with high repeatability. In addition to its lithography capabilities, BUHLER / LEYBOLD OPTICS Syrus Pro 1350 LION unit offers a range of auxiliary features to support efficient photoresist processing. These include integrated wafer handling robotics for automated substrate loading and unloading, as well as a comprehensive user interface for programming and monitoring process parameters. The machine's user-friendly design and intuitive operation make it easy for semiconductor manufacturers to set up and execute photoresist processing sequences with minimal training and oversight. BUHLER Syrus Pro 1350 LION tool is designed for high-throughput production environments, with rapid cycle times and efficient workflow management capabilities. The asset's robust construction and reliable performance ensure continuous operation and long-term stability, minimizing downtime and maximizing productivity. Its modular design also allows for easy upgrades and customization options to accommodate evolving process requirements and technology advancements in semiconductor manufacturing. Overall, LEYBOLD OPTICS Syrus Pro 1350 LION photoresist model represents a state-of-the-art solution for semiconductor manufacturers seeking unparalleled precision, reliability, and versatility in photoresist processing. With its advanced lithography technology, compatibility with a variety of photoresist materials, and comprehensive automation features, Syrus Pro 1350 LION equipment offers a comprehensive solution for achieving high-quality semiconductor devices with superior performance characteristics.
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