Used CALI-TECH CT-608D #9151584 for sale
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CALI-TECH CT-608D Photoresist Equipment is an advanced, high-performance etching and deposition tool, designed for applications in the semiconductor industry. It is ideal for sputter and plasma etch processes, as well as thin-film deposition and resist strip. The system features a large chamber, which can accommodate a wide range of substrates - up to 6 inches in diameter. Its vertical design provides easy access to the chamber interior, for easy maintenance and processing flexibility. The unit utilizes advanced mass-flow controllers to regulate process gases and ensure precision control. It also features innovative plasma generator and matching network systems for optimized plasma generation. CT-608D Photoresist Machine is designed for high-performance etching and deposition processes. It is equipped with precision photolithography tools and controllers, allowing accurate definition of geometries and dimensions on substrates. The photolithography tools enable light transmission, exposure, ultraviolet (UV) radiation, and post-exposure baking, as well as deep-UV resist light exposure. To ensure the best possible etch uniformity, the tool utilizes proprietary pulsed power modules (PPMs). This allows for adjustable pulse frequency, pulse width, and pulse energy, for the best possible result. CALI-TECH CT-608D Photoresist Asset also includes a scanning electron microscope (SEM), which can be used to monitor photoresist pattern integrity and levels of ion-energy implanted into the surface of the sample. CT-608D Photoresist Model offers excellent process and cooling capabilities. The equipment features Dynamic Spray Cooling (DSC), which provides uniform cooling to the substrate's entire surface area, while maintaining a satisfactory temperature profile. Its cooling capabilities allow fast processes, with minimal temperature stabilization times, enabling increased throughput. The system also includes thermal radiation shields, and noise barriers to reduce the impact of low-frequency ambient noise on the process chamber. To reduce environmental impact, the unit incorporates air and gas cycling systems which safely discard excess materials. CALI-TECH CT-608D Photoresist Machine is an incredibly powerful tool for the semiconductor industry. Its advanced tool features enable process flexibility and low environmental impact, while its precision photolithography and pulsed power technology enable high-precision etching and deposition. With CT-608D Photoresist Asset, users can produce reliable and high-quality substrates with minimal time and effort.
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