Used DNS / DAINIPPON RF3S #9392802 for sale

DNS / DAINIPPON RF3S
Manufacturer
DNS / DAINIPPON
Model
RF3S
ID: 9392802
Wafer Size: 12"
(5) Coater / (5) Developer system, 12".
DNS / DAINIPPON RF3S is a photoresist-developing equipment manufactured by DNS SCREEN, a well-known supplier of lithographic tools, machinery, and supplies. It is ideal for use in the production of microcircuits, MEMS (micro-electro-mechanical systems), and other micron-scale structures. DNS RF3S photoresist-developing system consists of three components: a resist material, a developing unit, and a stripping unit. The resist material is applied to the substrate using spin-coating or chemical vapor deposition techniques, and then exposed to light. Depending on the desired pattern, the light is generated back from a mask or from a light source directly. The light exposure causes a change in the structure of the resist material, resulting in a patterned resist film on the substrate. The developed unit then processes the resist material to remove the exposed part, and the remaining patterned resist can be selectively transferred onto the substrate. The stripping unit then removes the unwanted resist from the substrate, leaving only the patterned resist remains onto the substrate. The advantages of DAINIPPON RF3S photoresist-developing unit are numerous. It offers excellent pattern definition and resolution, with its line/space resolutions of 0.2μm (0.008mil) and 0.1μm (0.004mil), respectively. It also enables a high degree of planarization, which is essential for modern device production. In addition, the machine offers excellent ease-of-use and is affordable. Moreover, it can be seamlessly integrated into j-OTF®-compatible lithography tools. Finally, the printed resist pattern can be easily examined with its built-in QC monitor. The tool allows users to check defect resolution as well as image quality at the same time. In addition, it features a high-precision alignment by automatically aligning to the pattern reference with resolution of 0.2 μm (0.008mil). All these features make it a great choice for microelectronic device manufacturing.
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